Low‐temperature epitaxial regrowth of ion‐implanted amorphous GaAs

1980 ◽  
Vol 36 (12) ◽  
pp. 994-996 ◽  
Author(s):  
J. S. Williams ◽  
M. W. Austin
Keyword(s):  
Low Temperature ◽  
Epitaxial Regrowth ◽  
Ion Implanted

Investigation of Low-Temperature Epitaxial Regrowth of Ion-Implanted Amorphous GaAs

1989 ◽  
pp. 59-70
Author(s):  
J Herold ◽  
H Bartsch ◽  
W Wesch ◽  
G. Götz
Keyword(s):  
Low Temperature ◽  
Epitaxial Regrowth ◽  
Ion Implanted

Investigation of Low-Temperature Epitaxial Regrowth of Ion-Implanted Amorphous GaAs

1989 ◽  
Vol 111 (1) ◽  
pp. 59-70 ◽  
Author(s):  
J. Herold ◽  
H. Bartsch ◽  
W. Wesch ◽  
G. Götz
Keyword(s):  
Low Temperature ◽  
Epitaxial Regrowth ◽  
Ion Implanted

Low-temperature annealing of heavily ion-implanted layer

1990 ◽  
Vol 73 (6) ◽  
pp. 86-91
Author(s):  
Tadahiro Ohmi ◽  
Yoshio Ishihara ◽  
Tadashi Shibata ◽  
Akira Okita
Keyword(s):  
Low Temperature ◽  
Low Temperature Annealing ◽  
Ion Implanted

Structure and low-temperature thermal relaxation of ion-implanted germanium

2001 ◽  
Vol 8 (2) ◽  
pp. 773-775 ◽  
Author(s):  
C. J. Glover ◽  
M. C. Ridgway ◽  
K. M. Yu ◽  
G. J. Foran ◽  
C. Clerc ◽  
...  
Keyword(s):  
Low Temperature ◽  
Thermal Relaxation ◽  
Ion Implanted

scholarly journals Ion implantation and low‐temperature epitaxial regrowth of GaAs

1981 ◽  
Vol 52 (6) ◽  
pp. 4038-4046 ◽  
Author(s):  
M. G. Grimaldi ◽  
B. M. Paine ◽  
M‐A. Nicolet ◽  
D. K. Sadana
Keyword(s):  
Low Temperature ◽  
Ion Implantation ◽  
Epitaxial Regrowth

Low-Temperature Solid Phase Epitaxial Regrowth of Silicon for Stacked Static Random Memory Application

2011 ◽  
Vol 50 (1S1) ◽  
pp. 01AB06 ◽  
Author(s):  
Kong-Soo Lee ◽  
Chadong Yeo ◽  
Dae-Han Yoo ◽  
Seok-Sik Kim ◽  
Joo-Tae Moon ◽  
...  
Keyword(s):  
Low Temperature ◽  
Solid Phase ◽  
Epitaxial Regrowth
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