Pulsed sheath dynamics in a small cylindrical bore with an auxiliary electrode for plasma immersion ion implantation

X. C. Zeng; A. G. Liu; T. K. Kwok; P. K. Chu; B. Y. Tang

doi:10.1063/1.872607

Pulsed sheath dynamics in a small cylindrical bore with an auxiliary electrode for plasma immersion ion implantation

Physics of Plasmas ◽

10.1063/1.872607 ◽

1997 ◽

Vol 4 (12) ◽

pp. 4431-4434 ◽

Cited By ~ 9

Author(s):

X. C. Zeng ◽

A. G. Liu ◽

T. K. Kwok ◽

P. K. Chu ◽

B. Y. Tang

Keyword(s):

Ion Implantation ◽

Auxiliary Electrode ◽

Cylindrical Bore ◽

Plasma Immersion Ion Implantation

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Studies of the effects of the bore length during plasma immersion ion implantation of a small cylindrical bore with auxiliary electrode by two-dimensional fluid model

25th Anniversary, IEEE Conference Record - Abstracts. 1998 IEEE International Conference on Plasma Science (Cat. No.98CH36221) ◽

10.1109/plasma.1998.677723 ◽

2002 ◽

Author(s):

T.K. Kwok ◽

X.C. Zeng ◽

P.K. Chu

Keyword(s):

Ion Implantation ◽

Fluid Model ◽

Two Dimensional ◽

Auxiliary Electrode ◽

Cylindrical Bore ◽

Plasma Immersion Ion Implantation

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Plasma-immersion ion implantation of the interior surface of a small cylindrical bore using an auxiliary electrode for finite rise-time voltage pulses

IEEE Transactions on Plasma Science ◽

10.1109/27.669623 ◽

1998 ◽

Vol 26 (2) ◽

pp. 175-180 ◽

Cited By ~ 20

Author(s):

Xuchu Zeng ◽

Tat-Kun Kwok ◽

Aiguo Liu ◽

P.K. Chu ◽

Baoyin Tang ◽

...

Keyword(s):

Ion Implantation ◽

Rise Time ◽

Auxiliary Electrode ◽

Interior Surface ◽

Cylindrical Bore ◽

Plasma Immersion Ion Implantation ◽

Voltage Pulses

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Plasma immersion ion implantation of the interior surface of a large cylindrical bore using an auxiliary electrode

Journal of Applied Physics ◽

10.1063/1.366699 ◽

1998 ◽

Vol 83 (1) ◽

pp. 44-49 ◽

Cited By ~ 32

Author(s):

X. C. Zeng ◽

T. K. Kwok ◽

A. G. Liu ◽

P. K. Chu ◽

B. Y. Tang

Keyword(s):

Ion Implantation ◽

Auxiliary Electrode ◽

Interior Surface ◽

Cylindrical Bore ◽

Plasma Immersion Ion Implantation

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Improving the plasma immersion ion implantation impact energy inside a cylindrical bore by using an auxiliary electrode

Applied Physics Letters ◽

10.1063/1.117114 ◽

1996 ◽

Vol 69 (25) ◽

pp. 3815-3817 ◽

Cited By ~ 39

Author(s):

Xuchu Zeng ◽

Baoyin Tang ◽

Paul K. Chu

Keyword(s):

Ion Implantation ◽

Impact Energy ◽

Auxiliary Electrode ◽

Cylindrical Bore ◽

Plasma Immersion Ion Implantation

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Effects of the auxiliary electrode radius during plasma immersion ion implantation of a small cylindrical bore

Applied Physics Letters ◽

10.1063/1.119719 ◽

1997 ◽

Vol 71 (8) ◽

pp. 1035-1037 ◽

Cited By ~ 28

Author(s):

X. C. Zeng ◽

T. K. Kwok ◽

A. G. Liu ◽

P. K. Chu ◽

B. Y. Tang ◽

...

Keyword(s):

Ion Implantation ◽

Auxiliary Electrode ◽

Cylindrical Bore ◽

Plasma Immersion Ion Implantation

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Numerical simulation of plasma immersion ion implantation of a finite-length cylindrical bore with auxiliary electrode by two-dimensional fluid model

25th Anniversary, IEEE Conference Record - Abstracts. 1998 IEEE International Conference on Plasma Science (Cat. No.98CH36221) ◽

10.1109/plasma.1998.677638 ◽

2002 ◽

Author(s):

T.K. Kwok ◽

T.E. Sheridan ◽

X.C. Zeng ◽

P.K. Chu

Keyword(s):

Numerical Simulation ◽

Ion Implantation ◽

Finite Length ◽

Fluid Model ◽

Two Dimensional ◽

Auxiliary Electrode ◽

Cylindrical Bore ◽

Plasma Immersion Ion Implantation

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Effects of the auxiliary electrode radius during plasma immersion ion implantation of a small cylindrical bore

IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science ◽

10.1109/plasma.1997.604903 ◽

2002 ◽

Author(s):

X.C. Zeng ◽

A.G. Liu ◽

T.K. Kwok ◽

P.K. Chu ◽

B.Y. Tang

Keyword(s):

Ion Implantation ◽

Auxiliary Electrode ◽

Cylindrical Bore ◽

Plasma Immersion Ion Implantation

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Interior Surface Plasma Immersion Ion Implantation of a Small Cylindrical Bore Using a Noncoaxial Parallel Auxiliary Electrode

IEEE Transactions on Plasma Science ◽

10.1109/tps.2009.2013228 ◽

2009 ◽

Vol 37 (7) ◽

pp. 1123-1126

Author(s):

Chengsen Liu ◽

He Liu ◽

Du Li ◽

Dezhen Wang

Keyword(s):

Ion Implantation ◽

Auxiliary Electrode ◽

Surface Plasma ◽

Interior Surface ◽

Cylindrical Bore ◽

Plasma Immersion Ion Implantation

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Plasma Immersion Ion Implantation Into Inner Surface of Cylindrical Bore Using Moving Auxiliary Electrode

IEEE Transactions on Plasma Science ◽

10.1109/tps.2011.2162751 ◽

2011 ◽

Vol 39 (11) ◽

pp. 3120-3124 ◽

Cited By ~ 3

Author(s):

Peng Wang ◽

Xiubo Tian ◽

Chunzhi Gong ◽

Shiqin Yang ◽

Paul K. Chu

Keyword(s):

Ion Implantation ◽

Auxiliary Electrode ◽

Inner Surface ◽

Cylindrical Bore ◽

Plasma Immersion Ion Implantation

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Theoretical investigation of plasma immersion ion implantation of cylindrical bore using hollow cathode plasma discharge

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2009.02.136 ◽

2009 ◽

Vol 203 (17-18) ◽

pp. 2727-2730 ◽

Cited By ~ 7

Author(s):

Xiubo Tian ◽

Chunzhi Gong ◽

Yongxian Huang ◽

Haifu Jiang ◽

Shiqin Yang ◽

...

Keyword(s):

Ion Implantation ◽

Theoretical Investigation ◽

Hollow Cathode ◽

Plasma Discharge ◽

Cathode Plasma ◽

Cylindrical Bore ◽

Plasma Immersion Ion Implantation

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