RBS/Simulated Annealing and FTIR characterization of BCN films deposited by dual cathode magnetron sputtering
2019 ◽
Vol 37
(2)
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pp. 021203
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Keyword(s):
2009 ◽
Vol 68
(1)
◽
pp. 60-70
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Keyword(s):
2008 ◽
Vol 26
(2)
◽
pp. 198-204
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2008 ◽
Vol 873
(1-3)
◽
pp. 149-159
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2006 ◽
Vol 17
(2-4)
◽
pp. 305-310
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