scholarly journals Infrared spectroscopy for process control and fault detection of advanced semiconductor processes

1998 ◽  
Author(s):  
P. Rosenthal ◽  
W. Aarts ◽  
A. Bonanno ◽  
D. Boning ◽  
S. Charpenay ◽  
...  
Keyword(s):  
Infrared Spectroscopy ◽  
Fault Detection ◽  
Process Control

Near-infrared spectroscopy for process control and optimization of biogas plants

2010 ◽  
Vol 10 (6) ◽  
pp. 537-543 ◽  
Author(s):  
Stefan Luck ◽  
Gabriele Büge ◽  
Holger Plettenberg ◽  
Martin Hoffmann
Keyword(s):  
Infrared Spectroscopy ◽  
Process Control ◽  
Near Infrared Spectroscopy ◽  
Near Infrared ◽  
Biogas Plants

Controller Fault Detection Based on Multivariate Statistical Process Control

2001 ◽  
Vol 34 (27) ◽  
pp. 297-302
Author(s):  
Dongkwon Lee ◽  
Young-Hak Lee ◽  
Jin Hyun Park ◽  
Chonghun Han ◽  
In-Bewn Lee
Keyword(s):  
Fault Detection ◽  
Process Control ◽  
Statistical Process Control ◽  
Multivariate Statistical Process Control ◽  
Multivariate Statistical ◽  
Statistical Process
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