Effect of oxygen flow rate on properties of Cu4O3 thin films fabricated by radio frequency magnetron sputtering

Md Abdul Majed Patwary; Chun Yuen Ho; Katsuhiko Saito; Qixin Guo; Kin Man Yu; Wladek Walukiewicz; Tooru Tanaka

doi:10.1063/1.5144205

Effect of oxygen flow rate on properties of Cu4O3 thin films fabricated by radio frequency magnetron sputtering

Journal of Applied Physics ◽

10.1063/1.5144205 ◽

2020 ◽

Vol 127 (8) ◽

pp. 085302 ◽

Cited By ~ 1

Author(s):

Md Abdul Majed Patwary ◽

Chun Yuen Ho ◽

Katsuhiko Saito ◽

Qixin Guo ◽

Kin Man Yu ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Flow Rate ◽

Oxygen Flow Rate ◽

Radio Frequency Magnetron ◽

Oxygen Flow ◽

Radio Frequency Magnetron Sputtering ◽

Effect Of Oxygen

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Effect of oxygen flow rate on the ultraviolet sensing properties of zinc oxide nanocolumn arrays grown by radio frequency magnetron sputtering

Ceramics International ◽

10.1016/j.ceramint.2015.11.083 ◽

2016 ◽

Vol 42 (3) ◽

pp. 4107-4119 ◽

Cited By ~ 18

Author(s):

M.H. Mamat ◽

M.F. Malek ◽

N.N. Hafizah ◽

M.N. Asiah ◽

A.B. Suriani ◽

...

Keyword(s):

Zinc Oxide ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Flow Rate ◽

Oxygen Flow Rate ◽

Radio Frequency Magnetron ◽

Oxygen Flow ◽

Radio Frequency Magnetron Sputtering ◽

Sensing Properties ◽

Effect Of Oxygen

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Influence of oxygen flow rate and substrate positions on properties of Cu-oxide thin films fabricated by radio frequency magnetron sputtering using pure Cu target

Thin Solid Films ◽

10.1016/j.tsf.2019.02.026 ◽

2019 ◽

Vol 675 ◽

pp. 59-65 ◽

Cited By ~ 5

Author(s):

Md Abdul Majed Patwary ◽

Katsuhiko Saito ◽

Qixin Guo ◽

Tooru Tanaka

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Flow Rate ◽

Oxygen Flow Rate ◽

Radio Frequency Magnetron ◽

Oxygen Flow ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

Pure Cu

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Effect of oxygen flow rate and radio-frequency power on the photoconductivity of highly ultraviolet sensitive ZnO thin films grown by magnetron sputtering

Materials Research Bulletin ◽

10.1016/j.materresbull.2011.07.019 ◽

2011 ◽

Vol 46 (11) ◽

pp. 1975-1979 ◽

Cited By ~ 13

Author(s):

T. Ghosh ◽

D. Basak

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Flow Rate ◽

Oxygen Flow Rate ◽

Radio Frequency Power ◽

Oxygen Flow ◽

Zno Thin Films ◽

Effect Of Oxygen ◽

Frequency Power

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Oxygen Flow Rate Effect on Copper Oxide Thin Films Deposited by Radio Frequency Magnetron Sputtering

Thin Solid Films ◽

10.1016/j.tsf.2021.139013 ◽

2021 ◽

pp. 139013

Author(s):

Rabah TADJINE ◽

Amina HOUIMI ◽

Mohamed Mounes ALIM ◽

Noureddine OUDINI

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Copper Oxide ◽

Flow Rate ◽

Oxygen Flow Rate ◽

Rate Effect ◽

Oxygen Flow ◽

Radio Frequency Magnetron Sputtering ◽

Flow Rate Effect

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Effect of Oxygen Flow Rate in Zinc Oxide Radio Frequency Magnetron Sputtering on the Structural and Optical Properties of ZnO|PEDOT:PSS Inorganic|Organic Hetero-Junction

Semiconductors ◽

10.1134/s1063782620080151 ◽

2020 ◽

Vol 54 (8) ◽

pp. 844-852

Author(s):

B. Boroomand Nasab ◽

A. Kosarian ◽

N. Alaei Sheini

Keyword(s):

Zinc Oxide ◽

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Flow Rate ◽

Oxygen Flow Rate ◽

Oxygen Flow ◽

Radio Frequency Magnetron Sputtering ◽

Structural And Optical Properties ◽

Effect Of Oxygen

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Combined effect of oxygen deficient point defects and Ni doping in radio frequency magnetron sputtering deposited ZnO thin films

Thin Solid Films ◽

10.1016/j.tsf.2014.03.038 ◽

2014 ◽

Vol 562 ◽

pp. 37-42 ◽

Cited By ~ 17

Author(s):

B. Saha ◽

N.S. Das ◽

K.K. Chattopadhyay

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Point Defects ◽

Radio Frequency Magnetron ◽

Combined Effect ◽

Zno Thin Films ◽

Radio Frequency Magnetron Sputtering ◽

Ni Doping ◽

Effect Of Oxygen

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Effect of oxygen to argon ratio on properties of (Ba,Sr)TiO3 thin films prepared by radio-frequency magnetron sputtering

Journal of Applied Physics ◽

10.1063/1.365665 ◽

1997 ◽

Vol 82 (7) ◽

pp. 3482-3487 ◽

Cited By ~ 128

Author(s):

M. S. Tsai ◽

S. C. Sun ◽

T. Y. Tseng

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Effect Of Oxygen

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Effect of nitrogen flow rate on properties of nanostructured TiZrN thin films produced by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2010.04.099 ◽

2010 ◽

Vol 518 (24) ◽

pp. 7308-7311 ◽

Cited By ~ 30

Author(s):

Yu-Wei Lin ◽

Jia-Hong Huang ◽

Ge-Ping Yu

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Flow Rate ◽

Radio Frequency Magnetron ◽

Nitrogen Flow ◽

Radio Frequency Magnetron Sputtering ◽

Nitrogen Flow Rate

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Structural and optical properties of CdSe0.2Te0.8 thin films prepared by radio frequency magnetron sputtering

Materials Letters ◽

10.1016/j.matlet.2021.129320 ◽

2021 ◽

Vol 288 ◽

pp. 129320

Author(s):

Guangqiang He ◽

Zhihui Xiong ◽

Hui Yang ◽

Ming Yang ◽

Zhixi Li ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Structural And Optical Properties

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Fabrication of Mg3Sb2 thin films via radio-frequency magnetron sputtering and analysis of the corresponding electrical properties

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-021-06468-3 ◽

2021 ◽

Author(s):

Jun-ichi Tani ◽

Hiromichi Ishikawa

Keyword(s):

Thin Films ◽

Electrical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

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