Different stages of electron-beam evaporation of ceramic target in medium vacuum

2020 ◽  
Vol 127 (11) ◽  
pp. 113303 ◽  
Author(s):  
Yury G. Yushkov ◽  
Denis B. Zolotukhin ◽  
Efim M. Oks ◽  
Andrey V. Tyunkov
Keyword(s):  
Electron Beam ◽  
Electron Beam Evaporation ◽  
Ceramic Target ◽  
Medium Vacuum

On the effect of ceramic target composition on coatings deposited by electron-beam evaporation at forevacuum pressure

2020 ◽  
Vol 46 (17) ◽  
pp. 27641-27646
Author(s):  
Yu. G. Yushkov ◽  
E.M. Oks ◽  
K.V. Oskomov ◽  
A.V. Tyunkov ◽  
E.V. Yakovlev ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Evaporation ◽  
Ceramic Target ◽  
Target Composition

scholarly journals Evaluation of magnetic properties of thin magneto-dielectric films deposited from beam plasma in medium vacuum

2021 ◽  
Vol 2064 (1) ◽  
pp. 012073
Author(s):  
D Zolotukhin ◽  
A Tyunkov ◽  
Y Yushkov
Keyword(s):  
Thin Films ◽  
Magnetic Material ◽  
Magnetic Properties ◽  
Electron Beam ◽  
Electron Beam Evaporation ◽  
Dielectric Films ◽  
Alumina Ceramics ◽  
Microstrip Resonator ◽  
Resonator Method ◽  
Medium Vacuum

Abstract By electron-beam evaporation of a solid state dielectrics (alumina ceramics) and a magnetic material (steel-3) in fore-vacuum, thin films of several μm, possessing both dielectric and magnetic properties, were deposited on a substrate. The work shows that the microstrip resonator method can be used to assess the presence of magnetic properties in films.

An investigation of the structure of Nb/Si composite films formed by electron beam evaporation

1985 ◽  
Vol 131 (3-4) ◽  
pp. 261-266 ◽  
Author(s):  
M. Denhoff ◽  
B. Heinrich ◽  
A.E. Curzon ◽  
S. Gygax
Keyword(s):  
Electron Beam ◽  
Composite Films ◽  
Electron Beam Evaporation

Hard and superhard TiAlBN coatings deposited by twin electron-beam evaporation

2007 ◽  
Vol 201 (13) ◽  
pp. 6078-6083 ◽  
Author(s):  
C. Rebholz ◽  
M.A. Monclus ◽  
M.A. Baker ◽  
P.H. Mayrhofer ◽  
P.N. Gibson ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Evaporation

Liquid-phase metal vapor chemistry: rotary reactors and electron-beam evaporation sources

1990 ◽  
Vol 29 (5) ◽  
pp. 1068-1073 ◽  
Author(s):  
G. A. Ozin ◽  
Mark P. Andrews ◽  
C. G. Francis ◽  
H. X. Huber ◽  
K. Molnar
Keyword(s):  
Electron Beam ◽  
Liquid Phase ◽  
Metal Vapor ◽  
Electron Beam Evaporation

AlN thin films fabricated by ultra-high vacuum electron-beam evaporation with ammonia for silicon-on-insulator application

2005 ◽  
Vol 239 (3-4) ◽  
pp. 327-334 ◽  
Author(s):  
Ming Zhu ◽  
Peng Chen ◽  
Ricky K.Y. Fu ◽  
Weili Liu ◽  
Chenglu Lin ◽  
...  
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
High Vacuum ◽  
Electron Beam Evaporation ◽  
Silicon On Insulator ◽  
Ultra High Vacuum

Luminance Improvement of Red‐Emitting CaS : Eu Thin film Electroluminescent Cells Prepared by Electron Beam Evaporation

1989 ◽  
Vol 136 (9) ◽  
pp. 2736-2740 ◽  
Author(s):  
Ken‐ichi Onisawa ◽  
Kazuo Taguchi ◽  
Moriaki Fuyama ◽  
Katsumi Tamura ◽  
Yoshio Abe ◽  
...  
Keyword(s):  
Thin Film ◽  
Electron Beam ◽  
Electron Beam Evaporation
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