Basic factors for acquiring, correcting, and interpreting probe current-voltage characteristic in moderate-collisional plasma for determining electron energy distribution
1994 ◽
Vol 34
(5)
◽
pp. 607-633
◽
2014 ◽
Vol 32
(2)
◽
pp. 02B104
◽
Keyword(s):
1979 ◽
Vol 40
(C7)
◽
pp. C7-385-C7-386
Keyword(s):