Mathematical modeling of the process of reduction of tungsten hexafluoride with hydrogen

2019 ◽  
Author(s):  
Ayzhan Zhukzhanova ◽  
Alexander Shvab ◽  
Vladimir Brendakov
Author(s):  
Marylyn Bennett-Lilley ◽  
Thomas T.H. Fu ◽  
David D. Yin ◽  
R. Allen Bowling

Chemical Vapor Deposition (CVD) tungsten metallization is used to increase VLSI device performance due to its low resistivity, and improved reliability over other metallization schemes. Because of its conformal nature as a blanket film, CVD-W has been adapted to multiple levels of metal which increases circuit density. It has been used to fabricate 16 MBIT DRAM technology in a manufacturing environment, and is the metallization for 64 MBIT DRAM technology currently under development. In this work, we investigate some sources of contamination. One possible source of contamination is impurities in the feed tungsten hexafluoride (WF6) gas. Another is particle generation from the various reactor components. Another generation source is homogeneous particle generation of particles from the WF6 gas itself. The purpose of this work is to investigate and analyze CVD-W process-generated particles, and establish a particle characterization methodology.


2015 ◽  
Vol 46 (S 01) ◽  
Author(s):  
R. Lampe ◽  
N. Botkin ◽  
V. Turova ◽  
T. Blumenstein ◽  
A. Alves-Pinto

2020 ◽  
Vol 7 (3) ◽  
pp. 37-44
Author(s):  
KONSTANTIN NAPREENKO ◽  
◽  
ROMAN SAVELEV ◽  
ALEKSEY TROFIMOV ◽  
ANNA LAMTYUGINA ◽  
...  

The article discusses methods for determining the hydraulic resistance of units of an accident-resistant fuel system. A detailed description of the need to create such fuel systems for modern helicopters is given. The development of such systems today is impossible without the use of the method of mathematical modeling, which allows to qualitatively solve problems arising in the design process. To obtain accurate research results, it is necessary to have a complete description of all elements and assemblies of the system. Methods for determining the hydraulic characteristics of AFS elements using the drag coefficient, reference literature and CFD codes are considered. As the investigated AFS units, a drain valve and burst fitting were studied in the article. A hydraulic calculation of these AFS elements ware performed, the simulation results are presented in the ANSYS CFX software package. Also as the calculation results of bursting fitting, the pressure distribution fields of full and static pressure, velocity and streamlines are also shown. An experimental setup for validating the results obtained using the mathematical modeling method is considered, as well as a methodology for conducting a full-scale experiment to determine the hydraulic resistance of the unit. Materials have been prepared for inclusion in a one-dimensional mathematical model of an accident-resistant fuel system.


2020 ◽  
Vol 7 (2) ◽  
pp. 21-28
Author(s):  
SALI RADZHAPOV ◽  
◽  
RUSTAM RAKHIMOV ◽  
BEGJAN RADZHAPOV ◽  
MARS ZUFAROV

The article describes the developed radiometer for Express measurement of alpha radiation of radioactive elements based on a large-diameter silicon detector. The main element of the PPD detector is made using computer mathematical modeling of all stages of the technological process of manufacturing detectors, taking into account at each stage the degree of influence of the properties of the initial silicon on the electrophysical and radiometric characteristics of the detector. Detectors are manufactured for certain types of devices. The developed radiometer is designed to measure alpha radiation of natural isotopes (238U, 234U, 232Th, 226Ra, 222Rn, 218Po, 214Bi, etc.) in various environments. It also shows the principle of operation of the device, provides a block diagram of the measuring complex, describes the electronic components of the radiometer, as well as the block diagram. Signal transformations (spectrum transfer, filtering, accumulation) are implemented programmatically on the basis of a digital processing module. The device can detect the presence of specific elements in various environments, as well as protect people from the harmful effects of adverse radiation and can be used both in the field and stationary.


Sign in / Sign up

Export Citation Format

Share Document