Infrared and optical emission spectroscopy study of atmospheric pressure plasma-enhanced spatial ALD of Al2O3

2019 ◽  
Vol 115 (8) ◽  
pp. 083101 ◽  
Author(s):  
M. A. Mione ◽  
R. Engeln ◽  
V. Vandalon ◽  
W. M. M. Kessels ◽  
F. Roozeboom
Keyword(s):  
Atmospheric Pressure ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Atmospheric Pressure Plasma ◽  
Optical Emission ◽  
Spectroscopy Study ◽  
Pressure Plasma

scholarly journals Time resolved optical emission spectroscopy in power modulated atmospheric pressure plasma jet

2014 ◽  
Vol 13 (1) ◽  
Author(s):  
Jaroslav Hnilica ◽  
Lucia Potočňáková ◽  
Vít Kudrle
Keyword(s):  
Atmospheric Pressure ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Strong Dependence ◽  
Atmospheric Pressure Plasma ◽  
Optical Emission ◽  
Plasma Jet ◽  
Atmospheric Pressure Plasma Jet ◽  
Time Resolved ◽  
Pressure Plasma

AbstractIn this paper, the effects of the power modulation on atmospheric pressure plasma jet, operated in Ar+2%N2 mixture, are studied. Time resolved optical emission spectroscopy is used for the investigation. From line and band intensities, the excitation, vibration and rotation temperatures are calculated. Their evolution during the modulation period exhibits a strong dependence on modulation frequency. For higher modulation frequencies, there is significant discrepancy in rotational temperatures calculated from OH spectra and from N2+ spectra, which indicates that thermalisation time can reach milliseconds.

On-line diagnosis of O and OH radical in atmospheric pressure plasma jet by optical emission spectroscopy

2010 ◽  
Vol 22 (10) ◽  
pp. 2461-2464 ◽  
Author(s):  
刘忠伟 Liu Zhongwei ◽  
陈强 Chen Qiang ◽  
王正铎 Wang Zhengduo ◽  
杨丽珍 Yang Lizhen ◽  
李斌 Li Bin ◽  
...  
Keyword(s):  
Atmospheric Pressure ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Atmospheric Pressure Plasma ◽  
Optical Emission ◽  
Plasma Jet ◽  
Atmospheric Pressure Plasma Jet ◽  
Oh Radical ◽  
Pressure Plasma ◽  
On Line
Sign in / Sign up

Export Citation Format

Share Document