scholarly journals Design, modeling and theoretical analysis of a novel dual-axis hair flow sensor based on mode localization of weakly coupled resonators

AIP Advances ◽  
2019 ◽  
Vol 9 (5) ◽  
pp. 055030 ◽  
Author(s):  
Xin Guo ◽  
Bo Yang ◽  
Cheng Li
Keyword(s):  
Theoretical Analysis ◽  
Flow Sensor ◽  
Coupled Resonators ◽  
Mode Localization ◽  
Weakly Coupled

scholarly journals A Low-g MEMS Accelerometer with High Sensitivity, Low Nonlinearity and Large Dynamic Range Based on Mode-Localization of 3-DoF Weakly Coupled Resonators

Micromachines ◽  
2021 ◽  
Vol 12 (3) ◽  
pp. 310
Author(s):  
Muhammad Mubasher Saleem ◽  
Shayaan Saghir ◽  
Syed Ali Raza Bukhari ◽  
Amir Hamza ◽  
Rana Iqtidar Shakoor ◽  
...  
Keyword(s):  
Microelectromechanical Systems ◽  
Dynamic Range ◽  
Proof Mass ◽  
Amplitude Ratio ◽  
Silicon On Insulator ◽  
Coupled Resonators ◽  
Mode Localization ◽  
Mems Accelerometer ◽  
Weakly Coupled ◽  
Input Acceleration

This paper presents a new design of microelectromechanical systems (MEMS) based low-g accelerometer utilizing mode-localization effect in the three degree-of-freedom (3-DoF) weakly coupled MEMS resonators. Two sets of the 3-DoF mechanically coupled resonators are used on either side of the single proof mass and difference in the amplitude ratio of two resonator sets is considered as an output metric for the input acceleration measurement. The proof mass is electrostatically coupled to the perturbation resonators and for the sensitivity and input dynamic range tuning of MEMS accelerometer, electrostatic electrodes are used with each resonator in two sets of 3-DoF coupled resonators. The MEMS accelerometer is designed considering the foundry process constraints of silicon-on-insulator multi-user MEMS processes (SOIMUMPs). The performance of the MEMS accelerometer is analyzed through finite-element-method (FEM) based simulations. The sensitivity of the MEMS accelerometer in terms of amplitude ratio difference is obtained as 10.61/g for an input acceleration range of ±2 g with thermomechanical noise based resolution of 0.22 and nonlinearity less than 0.5%.

scholarly journals A mode-localized MEMS electrical potential sensor based on three electrically coupled resonators

2017 ◽  
Vol 6 (1) ◽  
pp. 1-8 ◽  
Author(s):  
Chun Zhao ◽  
Graham S. Wood ◽  
Suan Hui Pu ◽  
Michael Kraft
Keyword(s):  
Frequency Shift ◽  
Dynamic Range ◽  
Electrostatic Force ◽  
Electrical Potential ◽  
Coupled Resonators ◽  
Mode Localization ◽  
Resonant Sensors ◽  
Current State ◽  
Weakly Coupled ◽  
Resonator System

Abstract. We report a new class of MEMS resonant potential sensor based on the mode localization effect using a 3-degree-of-freedom (DoF) electrically weakly coupled resonator system. As opposed to previously reported electrically coupled 2DoF mode-localized resonant sensors, it can be shown in theory that the 3DoF structure has an improved sensitivity without sacrificing signal transduction, in addition to a reduced nonideal effect with regard to the vibration amplitudes and the motional currents. Experimentally, it has also been shown that several orders of magnitude higher sensitivity can be achieved compared to frequency shift and 2DoF mode-localized sensor. In the best case, we are able to demonstrate over 4 orders of magnitude improvement in sensitivity compared to frequency shift as an output signal. Compared to current state-of-the art 2DoF mode-localized sensor, the highest sensitivity improvement is over 123 times. An estimation of the noise floor of the sensor is 614 µV / √Hz for potential sensing, or an equivalent 57.6e / √Hz for charge sensing, and a dynamic range of 66.3 dB can be achieved. Furthermore, two different approaches for detection were investigated, perturbing the stiffness in the form of either an axial electrostatic force or a change in electrostatic spring. We were able to demonstrate that the approach of changing electrostatic spring is more sensitive than its counterpart.

An Acceleration Sensing Method Based on the Mode Localization of Weakly Coupled Resonators

2016 ◽  
Vol 25 (2) ◽  
pp. 286-296 ◽  
Author(s):  
Hemin Zhang ◽  
Boyang Li ◽  
Weizheng Yuan ◽  
Michael Kraft ◽  
Honglong Chang
Keyword(s):  
Coupled Resonators ◽  
Mode Localization ◽  
Weakly Coupled

scholarly journals Mode Localization and Sensitivity in Weakly Coupled Resonators

2019 ◽  
Vol 19 (8) ◽  
pp. 2999-3007 ◽  
Author(s):  
M. Manav ◽  
A. Srikantha Phani ◽  
Edmond Cretu
Keyword(s):  
Coupled Resonators ◽  
Mode Localization ◽  
Weakly Coupled

scholarly journals Nonlinear Analytical Model of Two Weakly Coupled MEMS Cantilevers for Mass Sensing Using Electrostatic Actuation

Proceedings ◽  
2018 ◽  
Vol 2 (13) ◽  
pp. 1084
Author(s):  
Toky Rabenimanana ◽  
Vincent Walter ◽  
Najib Kacem ◽  
Patrice Le Moal ◽  
Joseph Lardiès
Keyword(s):  
Analytical Model ◽  
Beam Theory ◽  
Continuous System ◽  
Mode Localization ◽  
Dc Voltage ◽  
Weakly Coupled ◽  
Flexible Supports ◽  
Nonlinear Analytical Model ◽  
Mems Mass Sensor ◽  
Mems Cantilevers

This paper presents a nonlinear analytical model of MEMS mass sensor, which is composed of two cantilevers of 98 µm and 100 µm length, 20 µm width and 1.3 µm thick. They are connected by a coupling beam and only the shortest cantilever is actuated by a combined AC-DC voltage. The DC voltage is used to equilibrate the system and the phenomenon of mode localization is investigated when a mass perturbation is applied. The sensor is modeled as a continuous system with beam theory and non-ideal boundary conditions are considered by using flexible supports. With a low AC voltage of 10 mV, a DC voltage of 5.85 V can counterbalance the length difference. This DC voltage decreases at 5.60 V when we increase the AC voltage, due to the effect of electrostatic nonlinearities. For a relative added mass of 0.1%, the amplitude change in the two cantilevers is more important when the coupling is weaker.

Ultra-Sensitive Force Transduction in Weakly Coupled Resonators

2020 ◽  
Author(s):  
Hemin Zhang ◽  
Milind Pandit ◽  
Jiangkun Sun ◽  
Dongyang Chen ◽  
Guillermo Sobreviela ◽  
...  
Keyword(s):  
Coupled Resonators ◽  
Weakly Coupled ◽  
Force Transduction
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