scholarly journals Remotely induced high-density hollow-anode plasma and its application to fast deposition of photosensitive microcrystalline silicon thin film with preferential orientation

AIP Advances ◽  
2019 ◽  
Vol 9 (5) ◽  
pp. 055125 ◽  
Author(s):  
Toshihiro Tabuchi ◽  
Yasumasa Toyoshima ◽  
Shinichi Fujimoto ◽  
Masayuki Takashiri
Keyword(s):  
Thin Film ◽  
High Density ◽  
Microcrystalline Silicon ◽  
Silicon Thin Film ◽  
Hollow Anode ◽  
Anode Plasma

Influence of the deposition temperature on the performance of microcrystalline silicon thin film transistors

2008 ◽  
Vol 52 (3) ◽  
pp. 432-435 ◽  
Author(s):  
Maher Oudwan ◽  
Alexey Abramov ◽  
Pere Roca i Cabarrocas ◽  
François Templier
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Deposition Temperature ◽  
Microcrystalline Silicon ◽  
Silicon Thin Film

Low temperature processed p-type bottom gate microcrystalline silicon thin film transistors

2010 ◽  
pp. NA-NA
Author(s):  
O. Moustapha ◽  
A. Abramov ◽  
D. Daineka ◽  
M. Oudwan ◽  
Y. Bonnassieux ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Thin Film Transistors ◽  
Microcrystalline Silicon ◽  
Silicon Thin Film ◽  
P Type ◽  
Bottom Gate

scholarly journals Investigation on stability of microcrystalline silicon thin film transistors

2006 ◽  
Vol 55 (12) ◽  
pp. 6612
Author(s):  
Li Juan ◽  
Wu Chun-Ya ◽  
Zhao Shu-Yun ◽  
Liu Jian-Ping ◽  
Meng Zhi-Guo ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Microcrystalline Silicon ◽  
Silicon Thin Film

n+-doped-layer-free microcrystalline silicon thin film transistors fabricated with the CuMg as source/drain metal

2007 ◽  
Vol 91 (2) ◽  
pp. 022113 ◽  
Author(s):  
M. C. Wang ◽  
T. C. Chang ◽  
Po-Tsun Liu ◽  
R. W. Xiao ◽  
L. F. Lin ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Microcrystalline Silicon ◽  
Silicon Thin Film

Microcrystalline silicon and excimer laser crystallized silicon Thin Film Transistors on the same substratel

2007 ◽  
Vol 515 (19) ◽  
pp. 7585-7589 ◽  
Author(s):  
T. Pier ◽  
K. Kandoussi ◽  
C. Simon ◽  
N. Coulon ◽  
H. Lhermite ◽  
...  
Keyword(s):  
Thin Film ◽  
Excimer Laser ◽  
Thin Film Transistors ◽  
Microcrystalline Silicon ◽  
Silicon Thin Film
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