scholarly journals A spectrometer for high-precision ion temperature and velocity measurements in low-temperature plasmas

2019 ◽  
Vol 90 (6) ◽  
pp. 063502 ◽  
Author(s):  
J. Milhone ◽  
K. Flanagan ◽  
M. D. Nornberg ◽  
M. Tabbutt ◽  
C. B. Forest
Keyword(s):  
Low Temperature ◽  
High Precision ◽  
Ion Temperature ◽  
Velocity Measurements ◽  
Low Temperature Plasmas

Virtual Instrument for automatic low temperature plasmas diagnostic considering finite positive ion temperature

Measurement ◽  
2014 ◽  
Vol 55 ◽  
pp. 66-73 ◽  
Author(s):  
J.M. Díaz-Cabrera ◽  
J.I. Fernández Palop ◽  
R. Morales Crespo ◽  
M.A. Hernández ◽  
A. Tejero-del-Caz ◽  
...  
Keyword(s):  
Low Temperature ◽  
Virtual Instrument ◽  
Ion Temperature ◽  
Low Temperature Plasmas ◽  
Positive Ion

Low-temperature plasmas with nonequilibrium ionization

1979 ◽  
Vol 128 (6) ◽  
pp. 233 ◽  
Author(s):  
L.M. Biberman ◽  
V.S. Vorob'ev ◽  
I.T. Yakubov
Keyword(s):  
Low Temperature ◽  
Nonequilibrium Ionization ◽  
Low Temperature Plasmas

High Precision Low Temperature Direct Wafer Bonding Technology for Wafer-Level 3D ICs Manufacturing

2016 ◽  
Vol 75 (9) ◽  
pp. 345-353 ◽  
Author(s):  
F. Kurz ◽  
T. Plach ◽  
J. Suss ◽  
T. Wagenleitner ◽  
D. Zinner ◽  
...  
Keyword(s):  
Low Temperature ◽  
High Precision ◽  
Wafer Bonding ◽  
Wafer Level ◽  
3D Ics ◽  
Direct Wafer Bonding ◽  
Bonding Technology

Nanosecond Pulse Burst Ignition of Ethylene and Acetylene by Uniform Low-Temperature Plasmas

2008 ◽  
Author(s):  
Evgeny Mintusov ◽  
Inchul Choi ◽  
Walter Lempert ◽  
Igor Adamovich ◽  
M. Nishihara ◽  
...  
Keyword(s):  
Low Temperature ◽  
Nanosecond Pulse ◽  
Pulse Burst ◽  
Low Temperature Plasmas

Drift-dissipative instability of the electromagnetic convection mode in a low-temperature plasma

1992 ◽  
Vol 47 (3) ◽  
pp. 439-443 ◽  
Author(s):  
Hamid Saleem ◽  
M. Y. Yu
Keyword(s):  
Low Temperature ◽  
Collisional Plasma ◽  
Low Temperature Plasma ◽  
Temperature Plasma ◽  
Electromagnetic Effects ◽  
Dissipative Instability ◽  
Low Temperature Plasmas ◽  
The Relationship

The convection mode in a collisional plasma is investigated, with the inclusion of electromagnetic effects. It is shown that a dissipative instability can occur. The relationship to several well-known modes as well as applications to typical low-temperature plasmas are discussed.

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