Free standing and solidly mounted Lamb wave resonators based on Al0.85Sc0.15N thin film
Keyword(s):
1999 ◽
Vol 7
(5)
◽
pp. 781-793
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2016 ◽
Vol 4
(27)
◽
pp. 10618-10626
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Keyword(s):
2017 ◽
Vol 25
(1)
◽
pp. 155-162
◽
Keyword(s):
2019 ◽
Vol 787
◽
pp. 1128-1135
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