Fabrication of nanopores in silicon nitride membrane by means of wet etching enhanced by focused helium ion beam irradiation

2019 ◽  
Author(s):  
Yu. V. Petrov ◽  
E. V. Ubyivovk ◽  
A. P. Baraban
Keyword(s):  
Silicon Nitride ◽  
Ion Beam ◽  
Wet Etching ◽  
Beam Irradiation ◽  
Ion Beam Irradiation ◽  
Silicon Nitride Membrane ◽  
Helium Ion

MoS2 Memtransistors Fabricated by Localized Helium Ion Beam Irradiation

ACS Nano ◽  
2019 ◽  
Vol 13 (12) ◽  
pp. 14262-14273 ◽  
Author(s):  
Jakub Jadwiszczak ◽  
Darragh Keane ◽  
Pierce Maguire ◽  
Conor P. Cullen ◽  
Yangbo Zhou ◽  
...  
Keyword(s):  
Ion Beam ◽  
Beam Irradiation ◽  
Ion Beam Irradiation ◽  
Helium Ion

scholarly journals Josephson Junctions and SQUIDs Created by Focused Helium-Ion-Beam Irradiation of YBa2Cu3O7

2019 ◽  
Vol 11 (4) ◽  
Author(s):  
B. Müller ◽  
M. Karrer ◽  
F. Limberger ◽  
M. Becker ◽  
B. Schröppel ◽  
...  
Keyword(s):  
Josephson Junctions ◽  
Ion Beam ◽  
Beam Irradiation ◽  
Ion Beam Irradiation ◽  
Helium Ion

New Process for Si Nanopyramid Array (NPA) Fabrication by Ion-Beam Irradiation and Wet Etching

2000 ◽  
Vol 39 (Part 1, No. 4B) ◽  
pp. 2186-2188 ◽  
Author(s):  
Meishoku Koh ◽  
Souichi Sawara ◽  
Tomomi Goto ◽  
Yoshinori Ando ◽  
Takahiro Shinada ◽  
...  
Keyword(s):  
Ion Beam ◽  
Wet Etching ◽  
Beam Irradiation ◽  
Ion Beam Irradiation ◽  
New Process

scholarly journals Graphene milling dynamics during helium ion beam irradiation

Carbon ◽  
2018 ◽  
Vol 138 ◽  
pp. 277-282 ◽  
Author(s):  
Songkil Kim ◽  
Ondrej Dyck ◽  
Anton V. Ievlev ◽  
Ivan V. Vlassiouk ◽  
Sergei V. Kalinin ◽  
...  
Keyword(s):  
Ion Beam ◽  
Beam Irradiation ◽  
Ion Beam Irradiation ◽  
Helium Ion ◽  
Milling Dynamics

scholarly journals MgB2 Josephson junctions produced by focused helium ion beam irradiation

AIP Advances ◽  
2018 ◽  
Vol 8 (7) ◽  
pp. 075020 ◽  
Author(s):  
L. Kasaei ◽  
T. Melbourne ◽  
V. Manichev ◽  
L. C. Feldman ◽  
T. Gustafsson ◽  
...  
Keyword(s):  
Josephson Junctions ◽  
Ion Beam ◽  
Beam Irradiation ◽  
Ion Beam Irradiation ◽  
Helium Ion

Annealing Effects in Hydrogenated Silicon Nitride Films during High Energy Ion Beam Irradiation

1995 ◽  
Vol 142 (9) ◽  
pp. 3210-3214 ◽  
Author(s):  
Joong‐Whan Lee ◽  
Sang‐Hwan Lee ◽  
Hyung‐Joun Yoo ◽  
Mu‐Shik Jhon ◽  
Ryong Ryoo
Keyword(s):  
Silicon Nitride ◽  
Ion Beam ◽  
High Energy ◽  
Beam Irradiation ◽  
Ion Beam Irradiation ◽  
Hydrogenated Silicon ◽  
Silicon Nitride Films ◽  
Annealing Effects

Defect Control andn-Doping of Encapsulated Graphene by Helium-Ion-Beam Irradiation

Nano Letters ◽  
2015 ◽  
Vol 15 (6) ◽  
pp. 4006-4012 ◽  
Author(s):  
Gaurav Nanda ◽  
Srijit Goswami ◽  
Kenji Watanabe ◽  
Takashi Taniguchi ◽  
Paul F. A. Alkemade
Keyword(s):  
Ion Beam ◽  
Beam Irradiation ◽  
Ion Beam Irradiation ◽  
Defect Control ◽  
Helium Ion
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