Validation of ion temperature measurement using an ion sensitive probe technique in finite boundary RF plasma
Keyword(s):
2003 ◽
Vol 74
(3)
◽
pp. 2111-2114
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1995 ◽
Vol 34
(Part 1, No. 3)
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pp. 1668-1672
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Keyword(s):
1989 ◽
Vol 62
(24)
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pp. 2833-2836
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1995 ◽
Vol 66
(1)
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pp. 930-932
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