Acoustic velocity sensor for the NRL ABC research platform

1996 ◽  
Author(s):  
Robert D. Corsaro ◽  
Brian Houston
1997 ◽  
Vol 101 (5) ◽  
pp. 3053-3053 ◽  
Author(s):  
Gerald C. Lauchle ◽  
Andrew R. Jones

2021 ◽  
Vol 2086 (1) ◽  
pp. 012053
Author(s):  
Y Enns ◽  
A Kazakin ◽  
Y Akulshin ◽  
A Mizerov ◽  
R Kleimanov

Abstract This paper results in results of analyzing the possibility of creating an acoustic velocity sensor using epitaxial GaN films. Technology for the fabrication of a microelectromechanical acoustic velocity sensor was developed and a prototype of the sensor was produced. The simulation of the characteristics of the obtained acoustic velocity sensors was carried out on the basis of the measured electrical characteristics, where the sensitivity and the directional pattern were determined.


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