The contamination of acoustic pressure measurements by sensor oscillations

1996 ◽  
Author(s):  
J. Surry ◽  
D. Kezele ◽  
C. Risley
Keyword(s):  
Acoustic Pressure ◽  
Pressure Measurements

Determination of Unsteady Heat Release Distribution in Unstable Combustor from Acoustic Pressure Measurements

1999 ◽  
Vol 15 (4) ◽  
pp. 613-616 ◽  
Author(s):  
Timothy C. Lieuwen ◽  
Yedidia Neumeier ◽  
Ben T. Zinn
Keyword(s):  
Heat Release ◽  
Acoustic Pressure ◽  
Pressure Measurements

Acoustic Field Analysis of a T Type Waveguide in Single Wafer Megasonic Cleaning and its Effect on Particle Removal

2007 ◽  
Vol 134 ◽  
pp. 229-232 ◽  
Author(s):  
Yang Lae Lee ◽  
Eui Su Lim ◽  
Kook Jin Kang ◽  
Hyun Se Kim ◽  
Tae Gon Kim ◽  
...  
Keyword(s):  
Finite Element Method ◽  
Acoustic Pressure ◽  
Field Analysis ◽  
Particle Removal ◽  
Pressure Measurements ◽  
Cleaning Efficiency ◽  
Transverse Waves ◽  
Megasonic Cleaning ◽  
Longitudinal Waves ◽  
Wafer Cleaning

T type megasonic waveguide was analyzed by finite element method (FEM), acoustic pressure measurements and particle removal efficiency for the single wafer cleaning application. Compared to conventional longitudinal waves, a transverse waves were generated in a T type waveguide. Not like longitudinal waves, transverse waves showed changes of direction and phase which increased the cleaning efficiency.

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