Concurrent wafer-level measurement of longitudinal and transverse effective piezoelectric coefficients (d33,f and e31,f) by double beam laser interferometry

2018 ◽  
Vol 123 (1) ◽  
pp. 014103 ◽  
Author(s):  
S. Sivaramakrishnan ◽  
P. Mardilovich ◽  
T. Schmitz-Kempen ◽  
S. Tiedke
Keyword(s):  
Laser Interferometry ◽  
Wafer Level ◽  
Beam Laser ◽  
Level Measurement ◽  
Double Beam

Electrode size dependence of piezoelectric response of lead zirconate titanate thin films measured by double beam laser interferometry

2013 ◽  
Vol 103 (13) ◽  
pp. 132904 ◽  
Author(s):  
S. Sivaramakrishnan ◽  
P. Mardilovich ◽  
A. Mason ◽  
A. Roelofs ◽  
T. Schmitz-Kempen ◽  
...  
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Size Dependence ◽  
Laser Interferometry ◽  
Lead Zirconate ◽  
Piezoelectric Response ◽  
Electrode Size ◽  
Beam Laser ◽  
Zirconate Titanate ◽  
Double Beam

Elimination of blind zone in nanoparticle removal on silicon wafers using a double-beam laser shockwave cleaning process

2021 ◽  
Vol 539 ◽  
pp. 148057
Author(s):  
Shuowen Zhang ◽  
Qingyu Yan ◽  
Jian Lin ◽  
Qunli Zhang ◽  
Yongfeng Lu ◽  
...  
Keyword(s):  
Silicon Wafers ◽  
Cleaning Process ◽  
Blind Zone ◽  
Beam Laser ◽  
Double Beam ◽  
Nanoparticle Removal

scholarly journals Enhancing Double-Beam Laser Tweezers Raman Spectroscopy (LTRS) for the Photochemical Study of Individual Airborne Microdroplets

Molecules ◽  
2019 ◽  
Vol 24 (18) ◽  
pp. 3325 ◽  
Author(s):  
Jovanny Gómez Castaño ◽  
Luc Boussekey ◽  
Jean Verwaerde ◽  
Myriam Moreau ◽  
Yeny Tobón
Keyword(s):  
Raman Spectroscopy ◽  
Optical Tweezers ◽  
Photochemical Reactions ◽  
Laser Tweezers ◽  
New Device ◽  
Spatially Resolved ◽  
Beam Laser ◽  
Coupling System ◽  
Double Beam ◽  
Levitated Droplets

A new device and methodology for vertically coupling confocal Raman microscopy with optical tweezers for the in situ physico- and photochemical studies of individual microdroplets (Ø ≤ 10 µm) levitated in air is presented. The coupling expands the spectrum of studies performed with individual particles using laser tweezers Raman spectroscopy (LTRS) to photochemical processes and spatially resolved Raman microspectroscopy on airborne aerosols. This is the first study to demonstrate photochemical studies and Raman mapping on optically levitated droplets. By using this configuration, photochemical reactions in aerosols of atmospheric interest can be studied on a laboratory scale under realistic conditions of gas-phase composition and relative humidity. Likewise, the distribution of photoproducts within the drop can also be observed with this setup. The applicability of the coupling system was tested by studying the photochemical behavior of microdroplets (5 µm < Ø < 8 µm) containing an aqueous solution of sodium nitrate levitated in air and exposed to narrowed UV radiation (254 ± 25 nm). Photolysis of the levitated NaNO3 microdroplets presented photochemical kinetic differences in comparison with larger NaNO3 droplets (40 µm < Ø < 80 µm), previously photolyzed using acoustic traps, and heterogeneity in the distribution of the photoproducts within the drop.

Concentration profiles in the electrodeposition of copper ferrocyanide by laser interferometry

1987 ◽  
Vol 65 (9) ◽  
pp. 2009-2012 ◽  
Author(s):  
R. N. O'Brien ◽  
K. S. V. Santhanam
Keyword(s):  
Laser Interferometry ◽  
Potassium Ferrocyanide ◽  
Slow Rotation ◽  
Concentration Profiles ◽  
Cupric Ion ◽  
Beam Laser ◽  
Paramagnetic Solution ◽  
Initial Resistance ◽  
Molecular Layers ◽  
Precipitate Layer

The electrodeposition of cupric ferrocyanide from a solution of potassium ferrocyanide with the convection-free parallel plane horizontal electrodes with the cathode over the anode was followed by multiple beam laser interferometry as well as the conventional electrochemical instrumentation. It is considered that the cupric ion generated immediately reacts with ferrocyanide ion to form a conducting adhering precipitate layer. The initial resistance of this layer is low. Its resistance is constant with thickness until about 5 × 10−8 C mm2 has been passed probably representing ~105 molecular layers when the resistance begins to rise. A magnetic field of 0.47 T caused a slight decrease in the resistance of the cell probably due to slow rotation of the inhomogeneous paramagnetic solution. This coating may be useful as an electrode.

Development of Lead-Free Piezoelectric Thick Films with a/b-Axis-Oriented Bi4-xPrxTi3O12

2006 ◽  
Vol 301 ◽  
pp. 61-64 ◽  
Author(s):  
Hirofumi Matsuda ◽  
Takashi Iijima
Keyword(s):  
Piezoelectric Coefficient ◽  
Thick Films ◽  
Lead Free ◽  
Piezoelectric Film ◽  
Chemical Solution ◽  
Solution Deposition ◽  
Beam Laser ◽  
Chemical Solution Deposition Method ◽  
Double Beam ◽  
Laser Displacement Meter

Pr-substituted Bi4Ti3O12 (BPT, Bi4-xPrxTi3O12, x=0.1-0.4) polycrystalline thick films with a-/b-axes orientations and thickness of 2-3 μm were grown on sputter-grown IrO2 layers by chemical solution deposition method for developing lead-free piezoelectric film microdevices. Electric-field-induced strains measurements were performed by double-beam laser displacement meter and longitudinal strain of e=0.25 % under 400 kV/cm and piezoelectric coefficient d33=63 pm/V at 10 Hz were observed in BPT thick film of x=0.1 with a-/b-axes mixed orientations. The value of strain closely related to spontaneous polarization and monotonously decreased with increasing x. Microstructures of 3 μm-thick BPT films were fabricated by photolithography and dry etching processes with several tens micrometers in size.

Low-Invasive Estimation of Physical Properties in Numerically Ill-Conditioned MEMS

2007 ◽  
Author(s):  
S. A. Spiewak ◽  
E. M. Lawrence
Keyword(s):  
System Analysis ◽  
Comprehensive Evaluation ◽  
Laser Interferometry ◽  
Empirical Modeling ◽  
Prototype System ◽  
Wafer Level ◽  
Modeling Methodology ◽  
Potential Applications ◽  
Laboratory Investigations ◽  
Arbitrary Precision

A prototype system for comprehensive evaluation of micro- and nano-electromechanical systems is presented. It features constitutive-empirical modeling methodology closely linked with symbolic, arbitrary precision computations. It is capable of resolving ambiguities created by numerical ill-conditioning in micro and nano scale systems. For precision low-invasive laboratory investigations or production (wafer level) metrology it employs laser interferometry and white light profilometry supported by extensive signal and system analysis software. Experimental results obtained with microfabricated beams and resonators illustrate the current performance of the system and hint its potential applications.

Thickness-Dependent Electrical Properties in Lanthanum-Doped Pzt Thick Films

1996 ◽  
Vol 433 ◽  
Author(s):  
H.D. Chen ◽  
K.K. Li ◽  
C.J. Gaskey ◽  
L.E. Cross
Keyword(s):  
Lead Zirconate Titanate ◽  
Thick Films ◽  
Sol Gel ◽  
Lead Zirconate ◽  
Silicon Substrates ◽  
Residual Tensile Stress ◽  
Beam Laser ◽  
Lanthanum Content ◽  
Double Beam ◽  
Gel Technique

AbstractLanthanum-doped lead zirconate titanate (PLZT) films, with thickness up to 10 μm, are fabricated on platinized silicon substrates through a modified sol-gel technique. Thicknessdependent piezoelectric properties measured with a double-beam laser interferometer show piezoelectric relaxation in field-induced strain as the ac driving field exceeds 10 kV/cm. In addition, the strain levels of PLZT thick films are approximately one third of those of undoped PZT films under the same fabrication and measurement conditions. For 1 μm PZT(55/45) films doped with 0, 2, and 4 mole% La, the P-E hysteresis exhibits decreasing squareness with increasing lanthanum content while the piezoelectric d33 coefficient reduces from 130 to 52 pC/N. Residual (tensile) stress in these films and resulted depoling effect may be responsible for this phenomenon.

Laser-Based Instrument for Electric Dichroism Spectroscopy of Small Molecules

1986 ◽  
Vol 40 (4) ◽  
pp. 483-486 ◽  
Author(s):  
K. L. Jansen ◽  
J. M. Harris
Keyword(s):  
Small Molecules ◽  
High Voltage ◽  
Electronic Structures ◽  
Dielectric Strength ◽  
Voltage Source ◽  
Chemical Information ◽  
Beam Laser ◽  
Double Beam ◽  
Electric Dichroism ◽  
High Voltage Source

While the chemical information provided by electric dichroism spectroscopy can be useful for studying the conformation and electronic structures of molecules in solution, the dichroism signals produced at fields approaching the dielectric strength of organic solvents are extremely small and difficult to detect. A double-beam, laser-based instrument for electric dichroism measurements is described which allows detection of dichroism signals corresponding to changes in absorbance of less than 10−6 with only a 1.2-kV high-voltage source.

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