High spatial frequency periodic structures formation on silicon using near UV femtosecond laser irradiation

2018 ◽  
Vol 112 (3) ◽  
pp. 032105 ◽  
Author(s):  
Rico S. Cahyadi ◽  
Ben Torralva ◽  
Steven M. Yalisove
2018 ◽  
Vol 441 ◽  
pp. 372-380 ◽  
Author(s):  
Yingying Ren ◽  
Limu Zhang ◽  
Carolina Romero ◽  
Javier R. Vázquez de Aldana ◽  
Feng Chen

2009 ◽  
Vol 3 (2) ◽  
pp. 151-156 ◽  
Author(s):  
Atsushi Mitani ◽  
◽  
Shinichi Hirai ◽  

Femtosecond laser technology forms minute, stable gratings on such materials as silicon and stainless steel. Forming a periodic structure on the surfaces of sliding parts improves tribology characteristics because adhesion decreases with reductions in area of contact. Double-pulsed femtosecond laser irradiation generates periodic structures with asymmetric profiles, along which, as we have shown elsewhere, microparts such as ceramic chip capacitors and resistors can be fed using simple symmetric planar vibration. Microparts move unidirectionally because they adhere to these surfaces asymmetrically. In testing the feasibility of feeding 0402 capacitors 0.4 × 0.2 × 0.2 mm in size and 0.1 mg weighting along an asymmetric surface fabricated using double-pulsed femtosecond laser irradiation, we evaluated differences in the profiles of the two inclined surfaces, effects of decreased adhesion, the forward and backward coefficient of friction, and the bidirectional friction angle of 0402 capacitors. Based on feed experimental results, we assessed the relationship between drive frequency and feed velocity and, by calculating variations in feed velocity, feed stability.


2012 ◽  
Vol 20 (2) ◽  
pp. 905 ◽  
Author(s):  
Jian-Wu Yao ◽  
Cheng-Yun Zhang ◽  
Hai-Ying Liu ◽  
Qiao-Feng Dai ◽  
Li-Jun Wu ◽  
...  

2012 ◽  
Vol 20 (28) ◽  
pp. 29882 ◽  
Author(s):  
S. H. Messaddeq ◽  
R. Vallée ◽  
P. Soucy ◽  
M. Bernier ◽  
M. El-Amraoui ◽  
...  

2021 ◽  
Vol 118 (24) ◽  
pp. 242106
Author(s):  
Alex Sarracino ◽  
Abdul R. Ansari ◽  
Ben Torralva ◽  
Steven Yalisove

2008 ◽  
Author(s):  
Wei Guo ◽  
Zeng Bo Wang ◽  
Lin Li ◽  
Zhu Liu ◽  
Boris Luk’yanchuk ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document