Near-field microwave tomography of planar semiconductor microstructures

2017 ◽  
Vol 122 (24) ◽  
pp. 244505 ◽  
Author(s):  
A. N. Reznik ◽  
N. V. Vostokov ◽  
N. K. Vdovicheva ◽  
S. A. Korolyov ◽  
V. I. Shashkin
2019 ◽  
Vol 126 (10) ◽  
pp. 105101 ◽  
Author(s):  
Vladimir P. Yakubov ◽  
Victor P. Belichenko ◽  
Sergey E. Shipilov ◽  
Aleksandr S. Mironchev ◽  
Andrey V. Klokov ◽  
...  

2004 ◽  
Vol 49 (4) ◽  
pp. 485-493 ◽  
Author(s):  
A. N. Reznik ◽  
N. V. Yurasova

2018 ◽  
Vol 60 (9) ◽  
pp. 733-749 ◽  
Author(s):  
K. P. Gaikovich ◽  
A. I. Smirnov ◽  
D. V. Yanin

2012 ◽  
Vol 55 (3) ◽  
pp. 131-135 ◽  
Author(s):  
Yu. A. Gayday ◽  
V. S. Sidorenko ◽  
O. V. Sinkevych

2021 ◽  
Vol 2021 (8) ◽  
Author(s):  
K.P. Gaikovich ◽  
◽  
A.I. Smirnov ◽  

In this paper, methods of near-field microwave tomography of the subsurface structure of dielectric inhomogeneities are proposed and studied based on the use of resonance probes with pieces of twin-wire lines as sensors. In frameworks of the quasi-static approximation, the integral equation of the inverse problem that relates measured variations of the complex capacity of the resonance system of probes placed above a medium with the inhomogeneous distribution of the complex permittivity. Based on this equation, methods and algorithms of tomography and holography have been proposed and worked out that used data of 2D scanning with variable offset between the sensor wires: (a) with the fixed direction of wires of sensor; (b) in two orthogonally related directions of sensor wires; (c) with the sensor of crossed twin-wire lines. Results of the numerical simulation demonstrate the efficiency of developed algorithms of subsurface tomography and holography.


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