Silicon epitaxy process recipe and tool configuration optimization

2017 ◽  
Author(s):  
W. H. Moy ◽  
K. Y. Cheong
2021 ◽  
Author(s):  
Ahmad Almadhor ◽  
Hafiz Tayyab Rauf ◽  
Muhammad Attique Khan ◽  
Seifedine Kadry ◽  
Yunyoung Nam

1982 ◽  
Vol 17 (2) ◽  
pp. 121-127
Author(s):  
E. Krullmann ◽  
W.L. Engl
Keyword(s):  

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