scholarly journals Approaching the intrinsic quality factor limit for micromechanical bulk acoustic resonators using phononic crystal tethers

2017 ◽  
Vol 111 (1) ◽  
pp. 013501 ◽  
Author(s):  
Vikrant J. Gokhale ◽  
Jason J. Gorman
Keyword(s):  
Quality Factor ◽  
Phononic Crystal ◽  
Acoustic Resonators ◽  
Intrinsic Quality

scholarly journals 422 Million intrinsic quality factor planar integrated all-waveguide resonator with sub-MHz linewidth

2021 ◽  
Vol 12 (1) ◽  
Author(s):  
Matthew W. Puckett ◽  
Kaikai Liu ◽  
Nitesh Chauhan ◽  
Qiancheng Zhao ◽  
Naijun Jin ◽  
...  
Keyword(s):  
Quality Factor ◽  
High Capacity ◽  
Precision Spectroscopy ◽  
Narrow Linewidth ◽  
Waveguide Resonator ◽  
Environmental Disturbances ◽  
Fiber Communications ◽  
Intrinsic Quality ◽  
Quality Factor Q ◽  
Quantum Photonics

AbstractHigh quality-factor (Q) optical resonators are a key component for ultra-narrow linewidth lasers, frequency stabilization, precision spectroscopy and quantum applications. Integration in a photonic waveguide platform is key to reducing cost, size, power and sensitivity to environmental disturbances. However, to date, the Q of all-waveguide resonators has been relegated to below 260 Million. Here, we report a Si3N4 resonator with 422 Million intrinsic and 3.4 Billion absorption-limited Qs. The resonator has 453 kHz intrinsic, 906 kHz loaded, and 57 kHz absorption-limited linewidths and the corresponding 0.060 dB m−1 loss is the lowest reported to date for waveguides with deposited oxide upper cladding. These results are achieved through a careful reduction of scattering and absorption losses that we simulate, quantify and correlate to measurements. This advancement in waveguide resonator technology paves the way to all-waveguide Billion Q cavities for applications including nonlinear optics, atomic clocks, quantum photonics and high-capacity fiber communications.

scholarly journals Concentric Split Aluminum with Silicon-Aluminum Nitride Annular Rings Resonators

Micromachines ◽  
2019 ◽  
Vol 10 (5) ◽  
pp. 296 ◽  
Author(s):  
Muhammad Ammar Khan ◽  
Jing-Fu Bao ◽  
Fei-Hong Bao ◽  
Xin Zhou
Keyword(s):  
Finite Element ◽  
Quality Factor ◽  
Phononic Crystal ◽  
Perfect Match ◽  
Band Gaps ◽  
Element Analysis ◽  
Vibration Displacement ◽  
Filling Fraction ◽  
Finite Element Analysis Simulation ◽  
Quality Factor Q

This paper presents a novel approach of annular concentric split rings microelectromechanical resonators with tether configuration to reduce anchor loss and gives very high-quality factor (Q) 2.97 Million based on FEA (Finite Element Analysis) simulation. The operating frequencies of these resonators are 188.55 MHz to 188.62 MHz. When the proposed SR (square rectangle) hole shaped one dimensional phononic crystal (1D PnC), and two dimensional phononic crystal (2D PnC) structure consist of very wide and complete band gaps is applied to novel design rings MEMS resonators, the quality factor (Q) further improved to 19.7 Million and 1750 Million, respectively, by using the finite element method. It is also observed that band gaps become closer by reducing the value of filling fraction, and proposed SR PnC gives extensive peak attenuation. Moreover, harmonic response of ring resonator is verified by the perfect match layers (PML) technique surrounded by resonators with varying width 1.5λ, and 3λ effectively reduce the vibration displacement.

Highly decoupled single-crystal silicon resonators: an approach for the intrinsic quality factor

2006 ◽  
Vol 16 (6) ◽  
pp. S45-S53 ◽  
Author(s):  
Baptiste Le Foulgoc ◽  
Tarik Bourouina ◽  
Olivier Le Traon ◽  
Alain Bosseboeuf ◽  
Frédéric Marty ◽  
...  
Keyword(s):  
Single Crystal ◽  
Quality Factor ◽  
Single Crystal Silicon ◽  
Crystal Silicon ◽  
Intrinsic Quality ◽  
Silicon Resonators
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