Coherent multi-dimensional spectroscopy at optical frequencies in a single beam with optical readout

2017 ◽  
Vol 147 (9) ◽  
pp. 094203 ◽  
Author(s):  
Hélène Seiler ◽  
Samuel Palato ◽  
Patanjali Kambhampati
Keyword(s):  
Single Beam ◽  
Optical Readout

Fabrication of two-layer integrated phase mask and single-beam, single exposure fabrication of 3D photonic crystal template using the mask

2008 ◽  
Author(s):  
Yuankun Lin ◽  
Ahmad Harb ◽  
Daniel Rodriguez ◽  
Karen Lozano ◽  
Di Xu ◽  
...  
Keyword(s):  
Photonic Crystal ◽  
Phase Mask ◽  
Single Exposure ◽  
Single Beam

Optimizing Gas-Assisted Processes for Ga and Xe FIB Circuit Edit Application

2016 ◽  
Author(s):  
Valery Ray ◽  
Josef V. Oboňa ◽  
Sharang Sharang ◽  
Lolita Rotkina ◽  
Eddie Chang ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
Structural Damage ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Beam Width ◽  
Ion Source ◽  
Reconstruction Technique ◽  
Beam Diameter ◽  
Current Profile ◽  
Single Beam

Abstract Despite commercial availability of a number of gas-enhanced chemical etches for faster removal of the material, there is still lack of understanding about how to take into account ion implantation and the structural damage by the primary ion beam during focused ion beam gas-assisted etching (FIB GAE). This paper describes the attempt to apply simplified beam reconstruction technique to characterize FIB GAE within single beam width and to evaluate the parameters critical for editing features with the dimensions close to the effective ion beam diameter. The approach is based on reverse-simulation methodology of ion beam current profile reconstruction. Enhancement of silicon dioxide etching with xenon difluoride precursor in xenon FIB with inductively coupled plasma ion source appears to be high and relatively uniform over the cross-section of the xenon beam, making xenon FIB potentially suitable platform for selective removal of materials in circuit edit application.

Sample Preparation and Preservation for TEM Analysis of Copper Interconnect Integrated Circuit

2004 ◽  
Author(s):  
Qiang Gao ◽  
Mark Zhang ◽  
Ming Li ◽  
Chorng Niou ◽  
W.T. Kary Chien
Keyword(s):  
Integrated Circuit ◽  
Thermal Exposure ◽  
Ambient Atmosphere ◽  
Ion Milling ◽  
Tem Analysis ◽  
Single Beam ◽  
Copper Interconnect ◽  
Beam Modulation ◽  
Area Of Interest ◽  
Transmission Electron

Abstract This paper examines copper-interconnect integrated circuit transmission electron microscope (TEM) sample contamination. It investigates the deterioration of the sample during ion milling and storage and introduces prevention techniques. The paper discusses copper grain agglomeration issues barrier/seed step coverage checking. The high temperature needed for epoxy solidifying was found to be harmful to sidewall coverage checking of seed. Single beam modulation using a glass dummy can efficiently prevent contamination of the area of interest in a TEM sample during ion milling. Adoption of special low-temperature cure epoxy resin can greatly reduce thermal exposure of the sample and prevent severe agglomeration of copper seed on via sidewall. TEM samples containing copper will deteriorate when stored in ordinary driers and sulphur contamination was found at the deteriorated point on the sample. Isolation of the sample from the ambient atmosphere has been verified to be very effective in protecting the TEM sample from deterioration.

scholarly journals Adaptive planning based on single beam optimization in passive scattering carbon ion radiotherapy for patients with pancreatic cancer

2021 ◽  
Vol 16 (1) ◽  
Author(s):  
Yang Li ◽  
Yoshiki Kubota ◽  
Masahiko Okamoto ◽  
Shintaro Shiba ◽  
Shohei Okazaki ◽  
...  
Keyword(s):  
Pancreatic Cancer ◽  
Carbon Ion Radiotherapy ◽  
Adaptive Planning ◽  
Carbon Ion ◽  
Single Beam ◽  
Original Plan ◽  
Image Registration Algorithm ◽  
Passive Scattering ◽  
Accumulated Dose ◽  
Dose Difference

Abstract Background Daily anatomical deviations may distort the dose distribution in carbon ion radiotherapy (CIRT), which may cause treatment failure. Therefore, this study aimed to perform re-planning to maintain the dose coverage in patients with pancreatic cancer with passive scattering CIRT. Methods Eight patients with pancreatic cancer and 95 daily computed tomography (CT) sets were examined. Two types of adaptive plans based on new range compensators (RCs) (AP-1) and initial RCs (AP-2) were generated. In AP-2, each beam was optimized by manually adjusting the range shifter thickness and spread-out Bragg peak size to make dose reduction by < 3% of the original plan. Doses of the original plan with bone matching (BM) and tumor matching (TM) were examined for comparison. We calculated the accumulated dose using the contour and intensity-based deformable image registration algorithm. The dosimetric differences in respect to the original plan were compared between methods. Results Using TM and BM, mean ± standard deviations of daily CTV V95 (%) difference from the original plan was − 5.1 ± 6.2 and − 8.8 ± 8.8, respectively, but 1.2 ± 3.4 in AP-1 and − 0.5 ± 2.1 in AP-2 (P < 0.001). AP-1 and AP-2 enabled to maintain a satisfactory accumulated dose in all patients. The dose difference was 1.2 ± 2.8, − 2,1 ± 1.7, − 7.1 ± 5.2, and − 16.5 ± 15.0 for AP-1, AP-2, TM, and BM, respectively. However, AP-2 caused a dose increase in the duodenum, especially in the left–right beam. Conclusions The possible dose deterioration should be considered when performing the BM, even TM. Re-planning based on single beam optimization in passive scattering CIRT seems an effective and safe method of ensuring the treatment robustness in pancreatic cancer. Further study is necessary to spare healthy tissues, especially the duodenum.

Towards Single-beam CARS Imaging of Reacting Flows

2010 ◽  
Author(s):  
Paul J. Wrzesinski ◽  
Dmitry Pestov ◽  
Vadim V. Lozovoy ◽  
Sukesh Roy ◽  
James R. Gord ◽  
...  
Keyword(s):  
Reacting Flows ◽  
Single Beam ◽  
Cars Imaging
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