Effect of annealing on pulse laser deposition grown copper oxide thin film

Author(s):  
Vaibhavi H. Mistry ◽  
Bhaumik V. Mistry ◽  
B. P. Modi ◽  
U. S. Joshi
2015 ◽  
Vol 73 (1) ◽  
Author(s):  
Jia Wei Low ◽  
Nafarizal Nayan ◽  
Mohd Zainizan Sahdan ◽  
Mohd Khairul Ahmad ◽  
Ali Yeon Md Shakaff ◽  
...  

Magnetron sputtering plasma for the deposition of copper oxide thin film has been investigated using optical emission spectroscopy and Langmuir probe. The intensity of the light emission from atoms and radicals in the plasma were measured using optical emission spectroscopy (OES). Then, Langmuir probe was employed to estimate the plasma density, electron temperature and ion flux. In present studies, reactive copper sputtering plasmas were produced at different oxygen flow rate of 0, 4, 8 and 16 sccm. The size of copper target was 3 inches. The dissipation rf power, Ar flow rate and working pressure were fixed at 400 W, 50 sccm and 22.5 mTorr, respectively. Since the substrate bias plays an important role to the thin film formation, the substrate bias voltages of 0, -40, -60 and -100 V were studied. Based on OES results, oxygen emission increased drastically when the oxygen flow rate above 8 sccm. On the other hand, copper and argon emission decreased gradually. In addition, Langmuir probe results showed a different ion flux when substrate bias voltage was applied. Based on these plasma diagnostic results, it has been concluded that the optimized parameter to produce copper oxide thin film are between -40 to -60 V of substrate bias voltage and between 8 to 12 sccm of oxygen flow rate.


2013 ◽  
Vol 1495 ◽  
Author(s):  
Kee-Chul Chang ◽  
Brian Ingram ◽  
Paul Salvador ◽  
Bilge Yildiz ◽  
Hoydoo You

ABSTRACTWe will briefly review in situ synchrotron x-ray investigation of model thin film cathode systems for solid oxide fuel cells. The film cathodes examined in this study are (La,Sr)MnO3_δ (LSM), (La,Sr)CoO3_δ (LSC), and La0.6Sr0.4Co0.2Fe0.8O3-δ (LSCF) thin films epitaxially grown on YSZ single crystal substrates by the pulse laser deposition technique. We find in all cases that Sr is enriched or segregated to the surface of the film cathodes. We concluded that the Sr enrichments or segregations are mainly the results of annealing because they do not depend on whether the cathodes are electrochemically biased or not during annealing. However, at least in the case of LSCF, we find that B-site Co segregates rather uniformly to the surface and the segregation responds sensitively and reversibly to the electrochemical bias.


2020 ◽  
Vol 46 (17) ◽  
pp. 27897-27902 ◽  
Author(s):  
N. Murugesan ◽  
S. Suresh ◽  
M. Kandasamy ◽  
S. Murugesan ◽  
S. Karthick Kumar

2017 ◽  
Author(s):  
Sergiu Macavei ◽  
Dana Toloman ◽  
Maria Stefan ◽  
Adriana Popa ◽  
Lucian Barbu-Tudoran ◽  
...  

2013 ◽  
Vol 534 ◽  
pp. 12-14 ◽  
Author(s):  
Tatsuya Ishimaru ◽  
Mirai Ieda ◽  
Shingo Ono ◽  
Yuui Yokota ◽  
Takayuki Yanagida ◽  
...  

2018 ◽  
Vol 5 (7) ◽  
pp. 15170-15173
Author(s):  
N. Sangwaranatee ◽  
M. Horprathum ◽  
C. Chananonnawathorn ◽  
Hendro

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