Contribution of optical emission spectroscopy measurements to the understanding of TiO2 growth by chemical vapor deposition using an atmospheric-pressure plasma torch

Y. Gazal; C. Chazelas; C. Dublanche-Tixier; P. Tristant

doi:10.1063/1.4979024

Contribution of optical emission spectroscopy measurements to the understanding of TiO2 growth by chemical vapor deposition using an atmospheric-pressure plasma torch

Journal of Applied Physics ◽

10.1063/1.4979024 ◽

2017 ◽

Vol 121 (12) ◽

pp. 123301 ◽

Cited By ~ 8

Author(s):

Y. Gazal ◽

C. Chazelas ◽

C. Dublanche-Tixier ◽

P. Tristant

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Atmospheric Pressure ◽

Emission Spectroscopy ◽

Plasma Torch ◽

Optical Emission Spectroscopy ◽

Atmospheric Pressure Plasma ◽

Chemical Vapor ◽

Optical Emission ◽

Pressure Plasma

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Electrical Characteristics of Magnesium Doped a-IGZO RRAM: Chemical Vapor Deposition using Enhanced Atmospheric Pressure-Plasma

2020 IEEE Eurasia Conference on IOT, Communication and Engineering (ECICE) ◽

10.1109/ecice50847.2020.9301987 ◽

2020 ◽

Author(s):

Chien-Hung Wu ◽

Song-Nian Kuo ◽

Yi-Ming Chen ◽

Kow-Ming Chang ◽

Yu Yang ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Atmospheric Pressure ◽

Atmospheric Pressure Plasma ◽

Chemical Vapor ◽

Electrical Characteristics ◽

Pressure Plasma

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Study of microwave discharge at high power density conditions in diamond chemical vapor deposition reactor by optical emission spectroscopy

Diamond and Related Materials ◽

10.1016/j.diamond.2019.04.030 ◽

2019 ◽

Vol 97 ◽

pp. 107407 ◽

Cited By ~ 4

Author(s):

S.A. Bogdanov ◽

A.M. Gorbachev ◽

A.L. Vikharev ◽

D.B. Radishev ◽

M.A. Lobaev

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Microwave Discharge ◽

Chemical Vapor ◽

Optical Emission ◽

High Power Density ◽

Chemical Vapor Deposition Reactor ◽

Diamond Chemical Vapor Deposition

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Analysis of optical emission spectroscopy in diamond chemical vapor deposition

Diamond and Related Materials ◽

10.1016/s0925-9635(00)00283-1 ◽

2000 ◽

Vol 9 (9-10) ◽

pp. 1716-1721 ◽

Cited By ~ 22

Author(s):

Y Liao ◽

C.H Li ◽

Z.Y Ye ◽

C Chang ◽

G.Z Wang ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Chemical Vapor ◽

Optical Emission ◽

Diamond Chemical Vapor Deposition

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Investigations of an atmospheric pressure plasma jet by optical emission spectroscopy

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2005.02.217 ◽

2005 ◽

Vol 200 (1-4) ◽

pp. 827-830 ◽

Cited By ~ 95

Author(s):

S. Förster ◽

C. Mohr ◽

W. Viöl

Keyword(s):

Atmospheric Pressure ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Atmospheric Pressure Plasma ◽

Optical Emission ◽

Plasma Jet ◽

Atmospheric Pressure Plasma Jet ◽

Pressure Plasma

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Atmospheric‐pressure plasma‐enhanced chemical vapor deposition of nanocomposite thin films from ethyl lactate and silica nanoparticles

Plasma Processes and Polymers ◽

10.1002/ppap.202000153 ◽

2020 ◽

Author(s):

Natalia Milaniak ◽

Gaétan Laroche ◽

Françoise Massines

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Silica Nanoparticles ◽

Vapor Deposition ◽

Atmospheric Pressure ◽

Atmospheric Pressure Plasma ◽

Chemical Vapor ◽

Ethyl Lactate ◽

Pressure Plasma ◽

Nanocomposite Thin Films

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Atmospheric Pressure Plasma Enhanced Chemical Vapor Deposition of Borophosphosilicate Glass Films

Japanese Journal of Applied Physics ◽

10.1143/jjap.47.1735 ◽

2008 ◽

Vol 47 (3) ◽

pp. 1735-1739 ◽

Cited By ~ 4

Author(s):

Minghui Yin ◽

Lingli Zhao ◽

Xiangyu Xu ◽

Shouguo Wang

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Atmospheric Pressure ◽

Atmospheric Pressure Plasma ◽

Chemical Vapor ◽

Pressure Plasma ◽

Borophosphosilicate Glass ◽

Glass Films

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Optical Emission Spectroscopy of an Atmospheric Pressure Plasma Jet during Tooth Bleaching Gel Treatment

Applied Spectroscopy ◽

10.1366/15-07962 ◽

2015 ◽

Vol 69 (11) ◽

pp. 1327-1333 ◽

Cited By ~ 8

Author(s):

Vedran Šantak ◽

Rok Zaplotnik ◽

Zrinka Tarle ◽

Slobodan Milošević

Keyword(s):

Atmospheric Pressure ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Atmospheric Pressure Plasma ◽

Optical Emission ◽

Plasma Jet ◽

Tooth Bleaching ◽

Atmospheric Pressure Plasma Jet ◽

Pressure Plasma ◽

Gel Treatment

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Film Precursor Formation in Metalorganic Chemical Vapor Deposition of Barium Strontium Titanate Films: A Study by Microdischarge Optical Emission Spectroscopy

Japanese Journal of Applied Physics ◽

10.1143/jjap.41.778 ◽

2002 ◽

Vol 41 (Part 1, No. 2A) ◽

pp. 778-783 ◽

Cited By ~ 8

Author(s):

Shun Momose ◽

Toshihiro Nakamura ◽

Kunihide Tachibana

Keyword(s):

Chemical Vapor Deposition ◽

Barium Strontium Titanate ◽

Vapor Deposition ◽

Emission Spectroscopy ◽

Metalorganic Chemical Vapor Deposition ◽

Optical Emission Spectroscopy ◽

Chemical Vapor ◽

Optical Emission ◽

Barium Strontium ◽

Metalorganic Chemical

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An investigation of tin oxide plasma-enhanced chemical vapor deposition using optical emission spectroscopy

Thin Solid Films ◽

10.1016/s0040-6090(02)00051-2 ◽

2002 ◽

Vol 406 (1-2) ◽

pp. 145-150 ◽

Cited By ~ 16

Author(s):

J.J. Robbins ◽

R.T. Alexander ◽

W. Xiao ◽

T.L. Vincent ◽

C.A. Wolden

Keyword(s):

Chemical Vapor Deposition ◽

Tin Oxide ◽

Vapor Deposition ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Chemical Vapor ◽

Optical Emission

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Surface modification of PDMS by atmospheric-pressure plasma-enhanced chemical vapor deposition and analysis of long-lasting surface hydrophilicity

Sensors and Actuators B Chemical ◽

10.1016/j.snb.2011.12.017 ◽

2012 ◽

Vol 162 (1) ◽

pp. 425-434 ◽

Cited By ~ 43

Author(s):

Donghee Lee ◽

Sung Yang

Keyword(s):

Surface Modification ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Atmospheric Pressure ◽

Atmospheric Pressure Plasma ◽

Chemical Vapor ◽

Surface Hydrophilicity ◽

Pressure Plasma

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