Capability of tip-enhanced Raman spectroscopy about nanoscale analysis of strained silicon for semiconductor devices production
2008 ◽
Vol 79
(1)
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pp. 013706
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Keyword(s):
2021 ◽
Vol 12
(3)
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pp. 1110-1115
2014 ◽
Vol 5
(18)
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pp. 3125-3130
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2016 ◽
Vol 18
(23)
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pp. 15510-15513
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2016 ◽
Vol 49
(9)
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pp. 2023-2030
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