Annularly grooved membrane combined with rood beam piezoresistive pressure sensor for low pressure applications

2017 ◽  
Vol 88 (3) ◽  
pp. 035002 ◽  
Author(s):  
Chuang Li ◽  
Francisco Cordovilla ◽  
José L. Ocaña
Keyword(s):  
Pressure Sensor ◽  
Low Pressure ◽  
Piezoresistive Pressure Sensor

scholarly journals Attachment of MEM piezoresistive silicon pressure sensor dies using different adhesives

2011 ◽  
Vol 65 (5) ◽  
pp. 497-505
Author(s):  
Vesna Jovic ◽  
Milan Matic ◽  
Branko Vukelic ◽  
Marko Starcevic ◽  
Milce Smiljanic ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Temperature Compensation ◽  
Pressure Sensors ◽  
Low Pressure ◽  
Glass Frit ◽  
Epoxy Adhesive ◽  
Internal Stresses ◽  
Linear Temperature ◽  
Piezoresistive Pressure Sensor ◽  
Glass Paste

This paper gives comparison and discussion of adhesives used for attachment of silicon piezoresistive pressure sensor dies. Special attention is paid on low pressure sensor dies because of their extreme sensitivity on stresses, which can arise from packaging procedure and applied materials. Commercially available adhesives ?Scotch Weld 2214 Hi-Temp? from ?3M Co.? and ?DM2700P/H848? from ?DIEMAT?, USA, were compared. First of them is aluminum filled epoxy adhesive and second is low melting temperature (LMT) glass paste. Comparing test results for low pressure sensor chips we found that LMT glass (glass frit) is better adhesive for this application. Applying LMT glass paste minimizes internal stresses caused by disagreement of coefficients of thermal expansions between sensor die and housing material. Also, it minimizes stresses introduced during applying external loads in the process of pressure measuring. Regarding the measurements, for the sensors installed with filled epoxy paste, resistor for compensation of temperature offset change had negative values in all cases, which means that linear temperature compensation, of sensors installed this way, would be impossible. In the sensors installed with LMT glass paste, all results, without exception, were in their common limits (values), which give the possibility of passive temperature compensation. Furthermore, LMT glass attachment can broaden temperature operating range of MEM silicon pressure sensors towards higher values, up to 120 ?C.

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