scholarly journals Comparison of the structural properties of Zn-face and O-face single crystal homoepitaxial ZnO epilayers grown by RF-magnetron sputtering

2017 ◽  
Vol 121 (1) ◽  
pp. 015304 ◽  
Author(s):  
R. Schifano ◽  
H. N. Riise ◽  
J. Z. Domagala ◽  
A. Yu. Azarov ◽  
R. Ratajczak ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Single Crystal ◽  
Structural Properties ◽  
Rf Magnetron Sputtering

Single Crystal, High Band Gap CdS Thin Films Grown by RF Magnetron Sputtering in Argon Atmosphere for Solar Cell Applications

2018 ◽  
Vol 10 (3) ◽  
pp. 03005-1-03005-6 ◽  
Author(s):  
Rupali Kulkarni ◽  
◽  
Amit Pawbake ◽  
Ravindra Waykar ◽  
Ashok Jadhawar ◽  
...  
Keyword(s):  
Thin Films ◽  
Solar Cell ◽  
Magnetron Sputtering ◽  
Single Crystal ◽  
Band Gap ◽  
Rf Magnetron Sputtering ◽  
Argon Atmosphere ◽  
Cds Thin Films ◽  
High Band

Electrical and structural properties of BaCe0.85Ru0.05Y0.10O3−δthin film prepared by RF magnetron sputtering

2016 ◽  
Vol 55 (6S1) ◽  
pp. 06GJ02 ◽  
Author(s):  
Masanori Ochi ◽  
Takashi Tsuchiya ◽  
Shohei Yamaguchi ◽  
Takaaki Suetsugu ◽  
Naoya Suzuki ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Structural Properties ◽  
Rf Magnetron Sputtering

Structural properties of Cu2O epitaxial films grown on c-axis single crystal ZnO by magnetron sputtering

2016 ◽  
Vol 108 (15) ◽  
pp. 152110 ◽  
Author(s):  
J. Gan ◽  
S. Gorantla ◽  
H. N. Riise ◽  
Ø. S. Fjellvåg ◽  
S. Diplas ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Single Crystal ◽  
Structural Properties ◽  
Epitaxial Films

Photoluminescence and Structural Properties of Si Nanoparticles Embedded in SiO2 Matrix by Reactive RF Magnetron Sputtering

2007 ◽  
Vol 336-338 ◽  
pp. 2074-2076
Author(s):  
K. Ma ◽  
Jia You Feng
Keyword(s):  
Magnetron Sputtering ◽  
Structural Properties ◽  
Near Infrared ◽  
Silicon Oxide ◽  
Rf Magnetron Sputtering ◽  
Sio2 Matrix ◽  
Si Nanoparticles ◽  
Oxide Matrix ◽  
Reactive Rf Magnetron Sputtering ◽  
Deposited Films

In the present work, we investigate the photoluminescence (PL) and structural properties of Si nanoparticles embedded in SiO2 matrix. Si-rich silicon oxide (SRSO) films with Si concentration of 39% were synthesized by reactive RF magnetron sputtering. Annealing was performed at temperatures between 600°C and 1100°C in N2 ambient for 2h to precipitate Si nanoparticles from oxide matrix. Near infrared photoluminescence around 750nm can be clearly observed even in the as-deposited films, which indicates the existence of Si nanoparticles in films. The structural properties were analyzed by infrared absorption and Raman spectra. It is found that the structural properties strongly affect the PL properties of Si nanoparticles embedded in SiO2 matrix.

Sensitivity of ZnO Based NH3 Sensor by RF Magnetron Sputtering

2012 ◽  
Vol 626 ◽  
pp. 168-172
Author(s):  
Samsiah Ahmad ◽  
Nor Diyana Md Sin ◽  
M.N. Berhan ◽  
Mohamad Rusop
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Structural Properties ◽  
Rf Magnetron Sputtering ◽  
Xrd Analysis ◽  
Zno Thin Films ◽  
Rf Power ◽  
Si Substrates

Zinc Oxide (ZnO) thin films were deposited onto SiO2/Si substrates using radio frequency (RF) magnetron sputtering method as an Ammonia (NH3) sensor. The dependence of RF power (50~300 Watt) on the structural properties and sensitivity of NH3sensor were investigated. XRD analysis shows that regardless of the RF power, all samples display the preferred orientation on the (002) plane. The results show that the ZnO deposited at 200 Watt display the highest sensitivity value which is 44%.

Electrical and structural properties of TiO2−δthin film with oxygen vacancies prepared by RF magnetron sputtering using oxygen radical

2016 ◽  
Vol 55 (6S1) ◽  
pp. 06GJ08 ◽  
Author(s):  
Kinya Kawamura ◽  
Naoya Suzuki ◽  
Takashi Tsuchiya ◽  
Yuichi Shimazu ◽  
Makoto Minohara ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Structural Properties ◽  
Oxygen Vacancies ◽  
Rf Magnetron Sputtering ◽  
Oxygen Radical
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