Experimental study of the volumetric recombination under energetic ion flow using a radio-frequency plasma source

2016 ◽  
Vol 23 (11) ◽  
pp. 112510 ◽  
Author(s):  
H. Takahashi ◽  
A. Okamoto ◽  
D. Nakamura ◽  
T. Miura ◽  
P. Boonyarittipong ◽  
...  
Keyword(s):  
Experimental Study ◽  
Radio Frequency ◽  
Plasma Source ◽  
Radio Frequency Plasma ◽  
Ion Flow ◽  
Frequency Plasma

Nitrogen doping of molecular beam epitaxially grown CdTe with a radio-frequency plasma source

1994 ◽  
Vol 138 (1-4) ◽  
pp. 443-447 ◽  
Author(s):  
K.A. Dhese ◽  
D.E. Ashenford ◽  
J.E. Nicholls ◽  
P. Devine ◽  
B. Lunn ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Nitrogen Doping ◽  
Molecular Beam ◽  
Plasma Source ◽  
Radio Frequency Plasma ◽  
Frequency Plasma
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