The reactor–activator for gas-jet deposition of diamond structures

2016 ◽  
Vol 87 (10) ◽  
pp. 103902 ◽  
Author(s):  
A. K. Rebrov ◽  
M. N. Andreev ◽  
T. T. B’yadovskiy ◽  
K. V. Kubrak ◽  
I. B. Yudin
Keyword(s):  
Gas Jet ◽  
Gas Jet Deposition

Gas jet deposition of thin films

1991 ◽  
Vol 48-49 ◽  
pp. 19-26 ◽  
Author(s):  
B.L. Halpern ◽  
J.J. Schmitt ◽  
J.W. Golz ◽  
Y. Di ◽  
D.L. Johnson
Keyword(s):  
Thin Films ◽  
Gas Jet ◽  
Gas Jet Deposition

Growth of diamond structures using high speed gas jet deposition activated in heated tungsten channels

2017 ◽  
Vol 325 ◽  
pp. 210-218 ◽  
Author(s):  
A.K. Rebrov ◽  
M.N. Andreev ◽  
T.T. Bieiadovskii ◽  
K.V. Kubrak
Keyword(s):  
High Speed ◽  
Gas Jet ◽  
Gas Jet Deposition

Activated gas jet deposition

2011 ◽  
Vol 519 (14) ◽  
pp. 4542-4544 ◽  
Author(s):  
A.K. Rebrov ◽  
R.V. Maltsev ◽  
A.I. Safonov ◽  
N.I. Timoshenko
Keyword(s):  
Gas Jet ◽  
Gas Jet Deposition

scholarly journals Multiscale characterization of synthetic diamonds obtained by gas-jet deposition

2018 ◽  
Vol 1105 ◽  
pp. 012132 ◽  
Author(s):  
Yu V Fedoseeva ◽  
K V Kubrak ◽  
L G Bulusheva ◽  
E A Maksimovskiy ◽  
D A Smirnov ◽  
...  
Keyword(s):  
Gas Jet ◽  
Synthetic Diamonds ◽  
Gas Jet Deposition

scholarly journals Effective cooling of substrates with low thermal conductivity under conditions of gas-jet MPCVD diamond synthesis

2021 ◽  
Vol 2119 (1) ◽  
pp. 012119
Author(s):  
A A Emelyanov ◽  
M Yu Plotnikov ◽  
N I Timoshenko ◽  
I B Yudin
Keyword(s):  
Thermal Conductivity ◽  
Experimental Study ◽  
Silicon Substrate ◽  
Microwave Discharge ◽  
Heat Removal ◽  
Gas Jet ◽  
Silicon Substrates ◽  
Diamond Synthesis ◽  
Substrate Holder ◽  
Gas Jet Deposition

Abstract The paper presents the results of an experimental study of heating molybdenum and silicon substrates under the conditions of gas-jet deposition of diamond structures using the precursor gases of a microwave discharge to activate. A cooled substrate holder using a metal melt to improve heat removal by reducing the thermal resistance between the substrate and the substrate holder has been developed. The use of the melt allowed lowering the temperature of the silicon substrate under the conditions of gas-jet deposition to a level that ensures the preservation of its structure. The developed substrate holders were used to carry out gas-jet synthesis of diamond structures on molybdenum and silicon substrates.

Application of Gas Jet Deposition Method to Piezoelectric Thick Film Miniature Actuator

1998 ◽  
Vol 37 (Part 1, No. 9B) ◽  
pp. 5342-5344 ◽  
Author(s):  
Andreas Schroth ◽  
Ryutaro Maeda ◽  
Jun Akedo ◽  
Masaaki Ichiki
Keyword(s):  
Thick Film ◽  
Gas Jet ◽  
Deposition Method ◽  
Gas Jet Deposition
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