An algorithm for circular test and improved optical configuration by two-dimensional (2D) laser heterodyne interferometer

2016 ◽  
Vol 87 (9) ◽  
pp. 095103 ◽  
Author(s):  
Shanzhi Tang ◽  
Shengrui Yu ◽  
Qingfu Han ◽  
Ming Li ◽  
Zhao Wang
2005 ◽  
Vol 295-296 ◽  
pp. 477-482
Author(s):  
K.W. Wang ◽  
Z.J. Cai ◽  
Li Jiang Zeng

A two-dimensional surface profile imaging technique based on heterodyne interferometer is proposed. A piezo translator vibrated grating is used to generate a heterodyne signal. A high speed CCD camera is used to extract the interference signal using a five step method. The uncertainty in the displacement measurement is approximately 0.035 µm within a measurement range of 1.7 µm, confirming the two dimensional heterodyne interferometer is valid for measuring the surface profile. The method is also available for low coherence heterodyne interferometer due to the optical frequency shifts caused by the vibration of grating independent on the wavelength.


2014 ◽  
Vol 22 (21) ◽  
pp. 25587 ◽  
Author(s):  
Enzheng Zhang ◽  
Qun Hao ◽  
Benyong Chen ◽  
Liping Yan ◽  
Yanna Liu

1968 ◽  
Vol 4 (5) ◽  
pp. 359-359 ◽  
Author(s):  
R. Cotman ◽  
W. Johnson ◽  
A. Larsen

2005 ◽  
Vol 2005.80 (0) ◽  
pp. _11-23_-_11-24_
Author(s):  
Yoshikazu ASAMI ◽  
Takeyoshi FUJITA ◽  
Sumio NAHARA ◽  
Shigeyoshi HISADA

2002 ◽  
Vol 2002.77 (0) ◽  
pp. _10-21_-_10-22_
Author(s):  
Naokazu TAKAZAWA ◽  
Takeyoshi FUJITA ◽  
Sumio NAKAHARA ◽  
Shigeyoshi HISADA

2011 ◽  
Vol 36 (20) ◽  
pp. 13255-13265 ◽  
Author(s):  
Saeed Olyaee ◽  
Mohammad Shams Esfand Abadi ◽  
Samaneh Hamedi ◽  
Fatemeh Finizadeh

1988 ◽  
Author(s):  
Jean-Loup Lesne ◽  
Alain Le Brun ◽  
Daniel Royer ◽  
Eugene Dieulesaint

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