GHz spurious mode free AlN lamb wave resonator with high figure of merit using one dimensional phononic crystal tethers

2016 ◽  
Vol 109 (1) ◽  
pp. 013506 ◽  
Author(s):  
Guoqiang Wu ◽  
Yao Zhu ◽  
Srinivas Merugu ◽  
Nan Wang ◽  
Chengliang Sun ◽  
...  
2019 ◽  
Vol 115 (9) ◽  
pp. 093501
Author(s):  
Xin Sun ◽  
Menglun Zhang ◽  
Chuanhai Gao ◽  
Yuan Ning ◽  
Yi Yuan ◽  
...  

2015 ◽  
Vol 29 (03) ◽  
pp. 1550002 ◽  
Author(s):  
Yinggang Li ◽  
Tianning Chen ◽  
Xiaopeng Wang

In this paper, we theoretically investigate the band structures of Lamb wave in one-dimensional radial phononic crystal (PC) slabs composed of a series of alternating strips of epoxy and aluminum. The dispersion relations, the power transmission spectra and the displacement fields of the eigenmodes are calculated by using the finite element method based on two-dimensional axial symmetry models in cylindrical coordinates. The axial symmetry model is validated by three-dimensional finite element model in Cartesian coordinates. Numerical results show that the proposed radial PC slabs can yield several complete band gaps with a variable bandwidth exist for elastic waves. Furthermore, the effects of the filling fraction and the slab thickness on the band gaps are further explored numerically. It is worth observing that, with the increase of the filling fraction, both the lower and upper edges of the band gaps are simultaneously shifted to higher frequency, which results from the enhancement interaction between the rigid resonance of the scatterer and the matrix. The slab thickness is the key parameter for the existence and the width of complete band gaps in the radial PC slabs. These properties of Lamb waves in the radial PC plates can potentially be applied to optimize band gaps, generate filters and design acoustic devices in the rotary machines and structures.


2015 ◽  
Vol 476 ◽  
pp. 82-87 ◽  
Author(s):  
Yinggang Li ◽  
Tianning Chen ◽  
Xiaopeng Wang ◽  
Suobin Li

Wave Motion ◽  
2015 ◽  
Vol 54 ◽  
pp. 66-75 ◽  
Author(s):  
Yi-Fan Zhu ◽  
Ying Yuan ◽  
Xin-Ye Zou ◽  
Jian-Chun Cheng

Micromachines ◽  
2021 ◽  
Vol 12 (1) ◽  
pp. 62
Author(s):  
Yinjie Tong ◽  
Tao Han

Energy leakage via anchors in substrate plates impairs the quality factor (Q) in microelectromechanical system (MEMS) resonators. Most phononic crystals (PnCs) require complicated fabrication conditions and have difficulty generating a narrow bandgap at high frequency. This paper demonstrates a pillar-based PnC slab with broad bandgaps in the ultra high frequency (UHF) range. Due to Bragg interference and local resonances, the proposed PnC structure creates notably wide bandgaps and shows great advantages in the high frequency, large electromechanical coupling coefficient (k2) thin film aluminum nitride (AlN) lamb wave resonator (LWR). The dispersion relations and the transmission loss of the PnC structure are presented. To optimize the bandgap, the influence of the material mechanical properties, lattice type, pillar height and pillar radius are explored. These parameters are also available to adjust the center frequency of the bandgap to meet the desirable operating frequency. Resonators with uniform beam anchors and PnC slab anchors are characterized. The results illustrate that the Q of the resonator improves from 1551 to 2384, and the mechanical energy leakage via the anchors is significantly decreased using the proposed PnC slab anchors. Moreover, employment of the PNC slab anchors has little influence on resonant frequency and induces no spurious modes. Pillar-based PnCs are promising in suppressing the anchor loss and further improving the Q of the resonators.


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