Optimization of design parameters for bulk micromachined silicon membranes for piezoresistive pressure sensing application

2016 ◽  
Author(s):  
Vinod Belwanshi ◽  
Anita Topkar
2021 ◽  
Author(s):  
Qiang Wei ◽  
Cao Ting ◽  
Weidong Liu ◽  
Ning Sun ◽  
Qu Fang ◽  
...  

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