Invited Article: Progress in coherent lithography using table-top extreme ultraviolet lasers

2015 ◽  
Vol 86 (12) ◽  
pp. 121301 ◽  
Author(s):  
W. Li ◽  
L. Urbanski ◽  
M. C. Marconi
Keyword(s):  
Extreme Ultraviolet ◽  
Ultraviolet Lasers ◽  
Extreme Ultraviolet Lasers

Picosecond pumping of extreme-ultraviolet lasers using preformed laser plasmas

1996 ◽  
Vol 13 (2) ◽  
pp. 436 ◽  
Author(s):  
H. Yamakoshi ◽  
P. R. Herman ◽  
M. P. Le Flohic ◽  
B. Xiao ◽  
L. Zhao ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Laser Plasmas ◽  
Ultraviolet Lasers ◽  
Extreme Ultraviolet Lasers

Extreme ultraviolet lasers demonstrate new nano-patterning schemes

2010 ◽  
Author(s):  
M. C. Marconi ◽  
P. Wachulak ◽  
L. Urbanski ◽  
C.S Menoni ◽  
J. J. Rocca ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Ultraviolet Lasers ◽  
Extreme Ultraviolet Lasers ◽  
Nano Patterning

scholarly journals Experiments and Simulations of Short-Pulse Laser-Pumped Extreme Ultraviolet Lasers

2004 ◽  
Vol 10 (6) ◽  
pp. 1373-1381 ◽  
Author(s):  
G.J. Tallents ◽  
Y. Abou-Ali ◽  
A. Demir ◽  
Q. Dong ◽  
M.H. Edwards ◽  
...  
Keyword(s):  
Pulse Laser ◽  
Extreme Ultraviolet ◽  
Short Pulse ◽  
Short Pulse Laser ◽  
Ultraviolet Lasers ◽  
Extreme Ultraviolet Lasers
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