Experimental investigations of electron heating dynamics and ion energy distributions in capacitive discharges driven by customized voltage waveforms

2015 ◽  
Vol 118 (22) ◽  
pp. 223302 ◽  
Author(s):  
Birk Berger ◽  
Steven Brandt ◽  
James Franek ◽  
Edmund Schüngel ◽  
Mark Koepke ◽  
...  
Keyword(s):  
Experimental Investigations ◽  
Energy Distributions ◽  
Electron Heating ◽  
Ion Energy ◽  
Ion Energy Distributions ◽  
Capacitive Discharges

The Influence of Ion Energy Distribution for Multiple Frequencies Driven

2013 ◽  
Vol 664 ◽  
pp. 947-953
Author(s):  
Zhu Wen Zhou ◽  
Yuan Sheng Wang ◽  
Bo Kong
Keyword(s):  
Integrated Circuit ◽  
Dual Frequency ◽  
Energy Distributions ◽  
Low Frequencies ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Multiple Frequencies ◽  
Ion Energy Distributions ◽  
Capacitive Discharges ◽  
Good Agreement

The voltages, resonant waves and frequencies how to influence on the ion energy distributions (IEDs) from multiple frequencies driven in capacitive discharges, it is important to analyze these phenomenon and mechanism in order to control the microelectronic processes of integrated circuit and develop the base theories of plasma physics. We focused on the function of the ion energy distributions under high and low frequencies (dual frequency) drive in capacitive discharges, we derived a model of computation of the multiple frequencies driven IEDs from analyzing theories. The model can analyze and predict the IEDs under different high and low frequencies driven, the results from the model are in good agreement with these important data from public publish.

A method for computing ion energy distributions for multifrequency capacitive discharges

2007 ◽  
Vol 101 (5) ◽  
pp. 056105 ◽  
Author(s):  
Alan C. F. Wu ◽  
M. A. Lieberman ◽  
J. P. Verboncoeur
Keyword(s):  
Energy Distributions ◽  
Ion Energy ◽  
Ion Energy Distributions ◽  
Capacitive Discharges
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