Fine pitch transition-edge sensor X-ray microcalorimeters with sub-eV energy resolution at 1.5 keV

2015 ◽  
Vol 107 (22) ◽  
pp. 223503 ◽  
Author(s):  
S. J. Lee ◽  
J. S. Adams ◽  
S. R. Bandler ◽  
J. A. Chervenak ◽  
M. E. Eckart ◽  
...  
Keyword(s):  
Energy Resolution ◽  
Transition Edge Sensor ◽  
X Ray ◽  
Fine Pitch ◽  
Transition Edge

EDS x-ray microcalorimeters with 13 eV energy resolution

1996 ◽  
Vol 54 ◽  
pp. 488-489
Author(s):  
D. A. Wollman ◽  
G. C. Hilton ◽  
K. D. Irwin ◽  
J. M. Martinis
Keyword(s):  
Energy Resolution ◽  
Temperature Rise ◽  
Energy Dispersive Spectroscopy ◽  
Transition Edge Sensor ◽  
Electrical Contact ◽  
Low Energy ◽  
Superconducting Transition ◽  
X Ray ◽  
Transition Edge ◽  
Eds Microanalysis

Although Si- and Ge-based Energy Dispersive Spectroscopy (EDS) detectors are by far the most commonly used x-ray spectrometers for microanalysis, they are limited by energy resolutions on the order of 100 eV. This low energy resolution is insufficient to clearly resolve many peak overlaps between Kα x-ray lines of different elements. In addition, many L and M lines of heavier elements fall in the 100 eV to 2 keV energy range, making it difficult in complicated spectra to identify and quantify the presence of technologically important lighter elements. Higher energy resolution and good count rates are necessary to provide improved limits of detectability.We are developing a cryogenic x-ray microcalorimeter with significantly improved energy resolution and a count rate and detector area suitable for EDS microanalysis. In a calorimeter, the energy of an x-ray is converted to heat, and a measurement of the temperature rise of the detector gives the deposited photon energy. Our microcalorimeter detector consists of a normal-metal x-ray absorber which is in thermal and electrical contact with a superconducting transition-edge sensor (TES).

scholarly journals Demonstration of Fine-Pitch High-Resolution X-ray Transition-Edge Sensor Microcalorimeters Optimized for Energies below 1 keV

2020 ◽  
Vol 199 (3-4) ◽  
pp. 949-954
Author(s):  
K. Sakai ◽  
J. S. Adams ◽  
S. R. Bandler ◽  
S. Beaumont ◽  
J. A. Chervenak ◽  
...  
Keyword(s):  
High Resolution ◽  
Transition Edge Sensor ◽  
X Ray ◽  
Fine Pitch ◽  
Transition Edge

Transition Edge Sensor (TES) X-Ray Detecting System with Sensitivity Correction to Stabilize the Spectrum Peak Center

2014 ◽  
Vol 617 ◽  
pp. 233-236
Author(s):  
Keiichi Tanaka ◽  
Masataka Ohgaki ◽  
Hidekazu Suzuki ◽  
Masakatsu Hasuda ◽  
Masato Yano ◽  
...  
Keyword(s):  
Energy Resolution ◽  
Transition Edge Sensor ◽  
High Energy ◽  
Transition Curve ◽  
High Energy Resolution ◽  
Time Interval ◽  
Heater Power ◽  
X Ray ◽  
Transition Edge ◽  
Superconducting Current

Transition Edge Sensor (TES) is an energy dispersive X-ray detecting system with high energy resolution. The energy resolution of this system depends on the steepness of superconducting transition curve from normal to superconducting state, heat capacitance and the operating temperature. The TES is based on the dilution refrigerator cooled by about 100 mK. The energy resolution is calculated about 1-2 eV for the detector with maximum detecting energy as 10 eV. The energy resolution also depends on the superconducting current flowing through the TES device because the superconducting current is affected by the temperature stability of the refrigerator. The fluctuation of the superconducting current means the fluctuation of the X-ray spectrum peak center. We have developed the sensitivity correction system to stabilize the peak center of the X-ray spectrum. The peak center of X-ray spectrum correlates with heater power to keep the base temperature of TES device at a constant temperature. The peak center of X-ray spectrum is calibrated by monitoring the heater power at constant time interval using the correlation curve between the peak center of X-ray spectrum and heater power.

High Count-Rate Studies of Small-Pitch Transition-Edge Sensor X-ray Microcalorimeters

2014 ◽  
Vol 176 (3-4) ◽  
pp. 597-603 ◽  
Author(s):  
S. J. Lee ◽  
S. R. Bandler ◽  
S. E. Busch ◽  
J. S. Adams ◽  
J. A. Chervenak ◽  
...  
Keyword(s):  
Count Rate ◽  
Transition Edge Sensor ◽  
High Count ◽  
High Count Rate ◽  
X Ray ◽  
Transition Edge ◽  
Small Pitch

scholarly journals Quantitative Analysis on an Electron Probe with the NIST Transition Edge Sensor Microcalorimeter X-ray Detector

2006 ◽  
Vol 12 (S02) ◽  
pp. 832-833
Author(s):  
T Jach ◽  
J Ullom ◽  
N Ritchie ◽  
J Beall
Keyword(s):  
Quantitative Analysis ◽  
Electron Probe ◽  
Transition Edge Sensor ◽  
X Ray ◽  
Transition Edge

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Transition-edge sensor array development for the ATHENA x-ray itegral field unit (Conference Presentation)

2018 ◽  
Author(s):  
Stephen J. Smith ◽  
Joseph S. Adams ◽  
Simon R. Bandler ◽  
James A. Chervenak ◽  
Megan E. Eckart ◽  
...  
Keyword(s):  
Sensor Array ◽  
Transition Edge Sensor ◽  
X Ray ◽  
Transition Edge ◽  
Field Unit

High sensitivity X-ray analysis for a low accelerating voltage scanning electron microscope using a transition edge sensor

Microscopy ◽  
2020 ◽  
Vol 69 (5) ◽  
pp. 298-303
Author(s):  
Keiichi Tanaka ◽  
Akira Takano ◽  
Atsushi Nagata ◽  
Satoshi Nakayama ◽  
Kaname Takahashi ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Intensity Ratio ◽  
Transition Edge Sensor ◽  
High Energy Resolution ◽  
Peak Intensity Ratio ◽  
X Ray ◽  
Peak Intensity ◽  
Transition Edge ◽  
Scanning Electron

Abstract A scanning electron microscope transition edge sensor has been developed to analyze the minor or trace constituents contained in a bulk sample and small particles on the sample under a low accelerating voltage (typically <3 keV). The low accelerating voltage enables to improve the spatial analysis resolution because the primary electron diffusion length is limited around the sample surface. The characteristic points of our transition edge sensor are 1) high-energy resolution at 7.2 eV@Al-Kα, 2) continuous operation by using a cryogen-free dilution refrigerator and 3) improvement of transmission efficiency at B-Kα by using thin X-ray film windows between the sample and detector (about 30 times better than our previous system). Our system could achieve a stabilization of the peak shift at Nd-Mα (978 eV) within 1 eV during an operation time of 27 000 s. The detection limits with B-Kα for detection times 600 and 27 000 s were 0.27 and 0.038 wt%, respectively. We investigated the peak separation ability by measuring the peak intensity ratio between the major constitute (silicon) and the minor constitute (tungsten) because the Si-Kα line differs from the W-Mα line by only 35 eV and a small W-Mα peak superimposed on the tail of the large Si-Kα peak. The peak intensity ratio (I(W-Mα)/I(Si-Kα)) was adjusted by the W particle area ratio compared with the Si substrate area. The transition edge sensor could clearly separate the Si-Kα and W-Mα lines even under a peak intensity ratio of 0.01.

scholarly journals Analysis of Impedance and Noise Data of an X-Ray Transition-Edge Sensor Using Complex Thermal Models

2012 ◽  
Vol 167 (3-4) ◽  
pp. 129-134 ◽  
Author(s):  
M. R. J. Palosaari ◽  
K. M. Kinnunen ◽  
M. L. Ridder ◽  
J. van der Kuur ◽  
H. F. C. Hoevers ◽  
...  
Keyword(s):  
Transition Edge Sensor ◽  
Thermal Models ◽  
X Ray ◽  
Transition Edge ◽  
Noise Data

Quantitative analysis with the transition edge sensor microcalorimeter X-ray detector

2007 ◽  
Vol 22 (2) ◽  
pp. 138-141 ◽  
Author(s):  
Terrence Jach ◽  
Nicholas Ritchie ◽  
Joel Ullom ◽  
James A. Beall
Keyword(s):  
Quantitative Analysis ◽  
Transition Edge Sensor ◽  
High Energy ◽  
Standard Reference Materials ◽  
High Energy Resolution ◽  
Chemical Methods ◽  
X Ray ◽  
Transition Edge ◽  
Direct Measurements ◽  
Better Than

We report on the use of a microcalorimeter X-ray detector with a transition edge sensor in an electron probe to perform quantitative analysis. We analyzed two bulk samples of multielement glasses that have been previously characterized by chemical methods for use as standard reference materials. The spectra were analyzed against standards using three different correction schemes. In one of the standards, the reference line was easily resolved despite its proximity within 45 eV of another line. With the exception of direct measurements of oxygen (a particularly challenging element), the results are in agreement with the certified characterization to better than 1% absolute or 8% relative. This demonstrates the potential of microcalorimeter detectors as replacements for conventional energy dispersive detectors in applications requiring high energy resolution.

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