Development of a detachable high speed miniature scanning probe microscope for large area substrates inspection

2015 ◽  
Vol 86 (11) ◽  
pp. 113706 ◽  
Author(s):  
Hamed Sadeghian ◽  
Rodolf Herfst ◽  
Jasper Winters ◽  
Will Crowcombe ◽  
Geerten Kramer ◽  
...  
Keyword(s):  
High Speed ◽  
Scanning Probe Microscope ◽  
Scanning Probe ◽  
Large Area ◽  
Probe Microscope

scholarly journals High Speed, Large Scan Area, Distortion Free Operation of a Single-Chip Scanning Probe Microscope

2016 ◽  
Vol 22 (S3) ◽  
pp. 372-373
Author(s):  
N. Sarkar ◽  
G. Lee ◽  
D Strathearn ◽  
M. Olfat ◽  
R.R. Mansour
Keyword(s):  
High Speed ◽  
Scanning Probe Microscope ◽  
Scanning Probe ◽  
Single Chip ◽  
Probe Microscope ◽  
Area Distortion

An Adjustable Inertia Balance Support for High-Speed Scanning Probe Microscope

2014 ◽  
Vol 1061-1062 ◽  
pp. 735-738
Author(s):  
Gang Yi Yan
Keyword(s):  
Traditional Method ◽  
High Speed ◽  
High Performance ◽  
Inertial Force ◽  
Scanning Probe Microscope ◽  
Scanning Probe ◽  
Current Structure ◽  
Probe Microscope ◽  
Promising Application ◽  
Supporting Base

An adjustable inertia balance support is proposed to counterbalance the inertial force from the actuators for high performance scanning probe microscope. The adjusting method is based on voltage proportion control. In contrast with traditional method that adding or removing mass, it is very convenient to adjust to minimize the inertial force transmitted to the supporting base. It may have a promising application on the current inertia balance support structure, which is used in some high-speed scanning probe microscope. What is more, it has a very good compatibility with current structure.

Novel control scheme for a high-speed metrological scanning probe microscope

2011 ◽  
Vol 22 (9) ◽  
pp. 094012 ◽  
Author(s):  
N Vorbringer-Dorozhovets ◽  
T Hausotte ◽  
E Manske ◽  
J C Shen ◽  
G Jäger
Keyword(s):  
High Speed ◽  
Scanning Probe Microscope ◽  
Scanning Probe ◽  
Control Scheme ◽  
Probe Microscope

Scanning-probe microscope analysis of optical thin films: A new analytical tool in a manufacturing environment

1994 ◽  
Vol 52 ◽  
pp. 1068-1069
Author(s):  
S. P. Sapers ◽  
R. Clark ◽  
P. Somerville
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Thermal Control ◽  
Scanning Probe Microscope ◽  
Scanning Probe ◽  
List Type ◽  
Manufacturing Environment ◽  
Physical Measurements ◽  
Probe Microscope

OCLI is a leading manufacturer of thin films for optical and thermal control applications. The determination of thin film and substrate topography can be a powerful way to obtain information for deposition process design and control, and about the final thin film device properties. At OCLI we use a scanning probe microscope (SPM) in the analytical lab to obtain qualitative and quantitative data about thin film and substrate surfaces for applications in production and research and development. This manufacturing environment requires a rapid response, and a large degree of flexibility, which poses special challenges for this emerging technology. The types of information the SPM provides can be broken into three categories:(1)Imaging of surface topography for visualization purposes, especially for samples that are not SEM compatible due to size or material constraints;(2)Examination of sample surface features to make physical measurements such as surface roughness, lateral feature spacing, grain size, and surface area;(3)Determination of physical properties such as surface compliance, i.e. “hardness”, surface frictional forces, surface electrical properties.

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