Detailed analysis of oxide related charges and metal-oxide barriers in terrace etched Al2O3and HfO2on AlGaN/GaN heterostructure capacitors
2017 ◽
Vol 50
(15)
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pp. 155101
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2011 ◽
pp. 595-619
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Keyword(s):
2001 ◽
Vol 01
(04)
◽
pp. L221-L226
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2020 ◽
Vol 8
(21)
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pp. 10625-10669
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Keyword(s):
2003 ◽
Vol 69
(2-4)
◽
pp. 130-137
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2011 ◽
pp. 595-619
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Keyword(s):
Keyword(s):