Dry efficient cleaning of poly-methyl-methacrylate residues from graphene with high-density H2 and H2-N2 plasmas
1987 ◽
Vol 27
(2)
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pp. 110-115
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2013 ◽
Vol 131
(10)
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pp. n/a-n/a
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Keyword(s):
2011 ◽
Vol 50
(7)
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pp. 071701
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Keyword(s):
1998 ◽
Vol 69
(9)
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pp. 1813-1819
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Keyword(s):
1987 ◽
Vol 29
(4)
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pp. 910-915
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