Note: A small roll angle measurement method with enhanced resolution based on a heterodyne interferometer
2015 ◽
Vol 86
(9)
◽
pp. 096104
◽
Keyword(s):
Keyword(s):
High resolution and stability roll angle measurement method for precision linear displacement stages
2017 ◽
Vol 88
(2)
◽
pp. 023102
◽
Keyword(s):
Keyword(s):
2019 ◽
Vol 30
(4)
◽
pp. 045005
◽
Keyword(s):