Development of ion beam figuring system with electrostatic deflection for ultraprecise X-ray reflective optics

2015 ◽  
Vol 86 (9) ◽  
pp. 093103 ◽  
Author(s):  
Jumpei Yamada ◽  
Satoshi Matsuyama ◽  
Yasuhisa Sano ◽  
Kazuto Yamauchi
Keyword(s):  
Ion Beam ◽  
X Ray ◽  
Reflective Optics ◽  
Electrostatic Deflection ◽  
Ion Beam Figuring

Progress in ion beam figuring of very thin slumped glass plates for lightweight x-ray telescope

2018 ◽  
Author(s):  
Marta M. Civitani ◽  
Mauro Ghigo ◽  
Joanna Holyszko ◽  
Gabriele Vecchi ◽  
Vincenzo Cotroneo ◽  
...  
Keyword(s):  
Ion Beam ◽  
X Ray ◽  
Glass Plates ◽  
Ion Beam Figuring

scholarly journals New figuring model based on surface slope profile for grazing-incidence reflective optics

2016 ◽  
Vol 23 (5) ◽  
pp. 1087-1090 ◽  
Author(s):  
Lin Zhou ◽  
Lei Huang ◽  
Nathalie Bouet ◽  
Konstantine Kaznatcheev ◽  
Matthew Vescovi ◽  
...  
Keyword(s):  
Ion Beam ◽  
Grazing Incidence ◽  
Measurement Noise ◽  
Surface Slope ◽  
Profile Data ◽  
Height Profile ◽  
Demonstration Experiment ◽  
Reflective Optics ◽  
Ion Beam Figuring ◽  
Height Data

Surface slope profile is widely used in the metrology of grazing-incidence reflective optics instead of surface height profile. Nevertheless, the theoretical and experimental model currently used in deterministic optical figuring processes is based on surface height, not on surface slope. This means that the raw slope profile data from metrology need to be converted to height profile to perform the current height-based figuring processes. The inevitable measurement noise in the raw slope data will introduce significant cumulative error in the resultant height profiles. As a consequence, this conversion will degrade the determinism of the figuring processes, and will have an impact on the ultimate surface figuring results. To overcome this problem, an innovative figuring model is proposed, which directly uses the raw slope profile data instead of the usual height data as input for the deterministic process. In this paper, first the influence of the measurement noise on the resultant height profile is analyzed, and then a new model is presented; finally a demonstration experiment is carried out using a one-dimensional ion beam figuring process to demonstrate the validity of our approach.

scholarly journals Ion beam figuring and optical metrology system for synchrotron x-ray mirrors

2019 ◽  
Author(s):  
Matthew Hand ◽  
Simon G. Alcock ◽  
Michael Hillman ◽  
Richard Littlewood ◽  
Simone Moriconi ◽  
...  
Keyword(s):  
Ion Beam ◽  
Optical Metrology ◽  
X Ray ◽  
Metrology System ◽  
Ion Beam Figuring

scholarly journals A one-dimensional ion beam figuring system for x-ray mirror fabrication

2015 ◽  
Vol 86 (10) ◽  
pp. 105120 ◽  
Author(s):  
Mourad Idir ◽  
Lei Huang ◽  
Nathalie Bouet ◽  
Konstantine Kaznatcheev ◽  
Matthew Vescovi ◽  
...  
Keyword(s):  
Ion Beam ◽  
One Dimensional ◽  
X Ray ◽  
Ion Beam Figuring

One-dimensional ion-beam figuring for grazing-incidence reflective optics

2016 ◽  
Vol 23 (1) ◽  
pp. 182-186 ◽  
Author(s):  
Lin Zhou ◽  
Mourad Idir ◽  
Nathalie Bouet ◽  
Konstantine Kaznatcheev ◽  
Lei Huang ◽  
...  
Keyword(s):  
Thin Film ◽  
Ion Beam ◽  
Grazing Incidence ◽  
Thin Film Deposition ◽  
Ion Source ◽  
Film Deposition ◽  
Vacuum System ◽  
One Dimensional ◽  
Reflective Optics ◽  
Ion Beam Figuring

One-dimensional ion-beam figuring (1D-IBF) can improve grazing-incidence reflective optics, such as Kirkpatrick–Baez mirrors. 1D-IBF requires only one motion degree of freedom, which reduces equipment complexity, resulting in compact and low-cost IBF instrumentation. Furthermore, 1D-IBF is easy to integrate into a single vacuum system with other fabrication processes, such as a thin-film deposition. The NSLS-II Optical Metrology and Fabrication Group has recently integrated the 1D-IBF function into an existing thin-film deposition system by adding an RF ion source to the system. Using a rectangular grid, a 1D removal function needed to perform 1D-IBF has been produced. In this paper, demonstration experiments of the 1D-IBF process are presented on one spherical and two plane samples. The final residual errors on both plane samples are less than 1 nm r.m.s. The surface error on the spherical sample has been successfully reduced by a factor of 12. The results show that the 1D-IBF method is an effective method to process high-precision 1D synchrotron optics.

Final correction by Ion Beam Figuring of thin shells for X-ray telescopes

2018 ◽  
Author(s):  
Mauro Ghigo ◽  
Stefano Basso ◽  
Marta M. Civitani ◽  
Bianca Salmaso ◽  
Giovanni Pareschi ◽  
...  
Keyword(s):  
Ion Beam ◽  
Thin Shells ◽  
X Ray ◽  
Ion Beam Figuring

Recent development in Kirkpatrick–Baez focusing systems at the ESRF

2011 ◽  
Vol 1 (MEDSI-6) ◽  
Author(s):  
R. Baker ◽  
R. Barrett ◽  
Y. Dabin ◽  
J. Gregoire ◽  
G. Malandrino ◽  
...  
Keyword(s):  
Synchrotron Radiation ◽  
High Efficiency ◽  
Ion Beam ◽  
European Synchrotron Radiation Facility ◽  
X Ray ◽  
Beam Focusing ◽  
The Past ◽  
Recent Developments ◽  
Elastic Emission Machining ◽  
Ion Beam Figuring

European Synchrotron Radiation Facility (ESRF) in-house designed Kirkpatrick–Baez (KB) focusing systems have been extensively used for high efficiency beam focusing over the past years. More recently however, increasing interest in nanofocusing techniques has directed our development efforts towards more compact, higher stability designs for dynamic focusing systems in which the optimization of numerous parameters enables mirror bending approaching its mechanical limits. Simultaneously, progress in fixed focus mirror fabrication techniques – notably ion beam figuring, differential deposition and elastic emission machining – now make the fabrication of highly elliptical, fixed focus X-ray optics an interesting option. This has simplified conception (no bending mechanics) which in turn has led to the design of miniaturized KBs.A general overview of these recent developments in both dynamic bending and fixed focus KB systems is presented.

scholarly journals Development of a position–velocity–time-modulated two-dimensional ion beam figuring system for synchrotron x-ray mirror fabrication

2020 ◽  
Vol 59 (11) ◽  
pp. 3306 ◽  
Author(s):  
Tianyi Wang ◽  
Lei Huang ◽  
Yi Zhu ◽  
Matthew Vescovi ◽  
Denis Khune ◽  
...  
Keyword(s):  
Ion Beam ◽  
Two Dimensional ◽  
X Ray ◽  
Ion Beam Figuring
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