Electron density dependence of impedance probe plasma potential measurements

2015 ◽  
Vol 22 (8) ◽  
pp. 083505 ◽  
Author(s):  
D. N. Walker ◽  
D. D. Blackwell ◽  
W. E. Amatucci
2012 ◽  
Author(s):  
David N. Walker ◽  
R. F. Fernsler ◽  
D. D. Blackwell ◽  
W. E. Amatucci

1987 ◽  
Vol 26 (Part 1, No. 1) ◽  
pp. 184-185
Author(s):  
Yukio Watanabe ◽  
Masaharu Shiratani ◽  
Sukeomi Ogi ◽  
Naoki Kunihiro

2000 ◽  
Vol 178 (1) ◽  
pp. 465-470 ◽  
Author(s):  
R. Kaur ◽  
A.J. Shields ◽  
J.L. Osborne ◽  
M.Y. Simmons ◽  
D.A. Ritche ◽  
...  

2010 ◽  
Vol 17 (11) ◽  
pp. 113503 ◽  
Author(s):  
D. N. Walker ◽  
R. F. Fernsler ◽  
D. D. Blackwell ◽  
W. E. Amatucci

1970 ◽  
Vol 1 (3) ◽  
pp. 887-896 ◽  
Author(s):  
Jacques Berlande ◽  
Michel Cheret ◽  
Robert Deloche ◽  
Alain Gonfalone ◽  
Claude Manus

2021 ◽  
Vol 921 (2) ◽  
pp. 115
Author(s):  
Nobuyuki Nakamura ◽  
Naoki Numadate ◽  
Yasutaka Kono ◽  
Izumi Murakami ◽  
Daiji Kato ◽  
...  

2014 ◽  
Vol 513-517 ◽  
pp. 28-32
Author(s):  
T.Y. Huang ◽  
C.G. Jin ◽  
M.Z. Wu ◽  
L.J. Zhuge ◽  
X.M. Wu

A helicon wave plasma (HWP) discharge with strong magnetic field was investigated. The HWP was produced with an internal Nagoya III antenna that is perpendicular to the magnetic field and driven by a 13.56 MHz radio-frequency (RF) source. HWP was characterized in terms of electron density, electron temperature and plasma potential using a single Langmuir probe in Ar gas. The result of Langmuir probe shows that the electron density increases with RF power, but saturate above 700 W at a density of 2×1019m-3. Scanning electron microscopy (SEM) was extensively used to characterize the quality of the graphite surface. The result of SEM shows the surface of graphite that exposed to plasma processing has exhibited smoother and compacter surface topography. Meanwhile, the concentration of impurity on the graphite surface decreases with plasma processing.


2008 ◽  
Vol 113 (A9) ◽  
pp. n/a-n/a ◽  
Author(s):  
E. Spencer ◽  
S. Patra ◽  
T. Andriyas ◽  
C. Swenson ◽  
J. Ward ◽  
...  

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