Mechanisms for dose retention in conformal arsenic doping using a radial line slot antenna microwave plasma source

2015 ◽  
Vol 117 (22) ◽  
pp. 224904 ◽  
Author(s):  
Hirokazu Ueda ◽  
Peter L. G. Ventzek ◽  
Masahiro Oka ◽  
Yuuki Kobayashi ◽  
Yasuhiro Sugimoto
Keyword(s):  
Microwave Plasma ◽  
Plasma Source ◽  
Slot Antenna ◽  
Radial Line ◽  
Arsenic Doping

Slot antenna 2.45 GHz microwave plasma source

1994 ◽  
Vol 3 (4) ◽  
pp. 473-481 ◽  
Author(s):  
F Werner ◽  
D Korzec ◽  
J Engemann
Keyword(s):  
Microwave Plasma ◽  
Plasma Source ◽  
Slot Antenna

Characterization of a slot antenna microwave plasma source for hydrogen plasma cleaning

1995 ◽  
Vol 13 (4) ◽  
pp. 2074-2085 ◽  
Author(s):  
D. Korzec ◽  
F. Werner ◽  
A. Brockhaus ◽  
J. Engemann ◽  
T. P. Schneider ◽  
...  
Keyword(s):  
Microwave Plasma ◽  
Hydrogen Plasma ◽  
Plasma Source ◽  
Slot Antenna ◽  
Plasma Cleaning

Electron temperature measurement in a slot antenna 2.45 GHz microwave plasma source

2001 ◽  
Vol 19 (2) ◽  
pp. 410 ◽  
Author(s):  
J. Cotrino ◽  
A. Palmero ◽  
V. Rico ◽  
A. Barranco ◽  
J. P. Espinós ◽  
...  
Keyword(s):  
Electron Temperature ◽  
Temperature Measurement ◽  
Microwave Plasma ◽  
Plasma Source ◽  
Slot Antenna

Remote deposition of scratch resistant films by use of slot antenna microwave plasma source

1996 ◽  
Vol 281-282 ◽  
pp. 143-145 ◽  
Author(s):  
D. Korzec ◽  
K. Traub ◽  
F. Werner ◽  
J. Engemann
Keyword(s):  
Microwave Plasma ◽  
Plasma Source ◽  
Slot Antenna

Conformal doping of topographic silicon structures using a radial line slot antenna plasma source

2014 ◽  
Vol 115 (21) ◽  
pp. 214904 ◽  
Author(s):  
Hirokazu Ueda ◽  
Peter L. G. Ventzek ◽  
Masahiro Oka ◽  
Masahiro Horigome ◽  
Yuuki Kobayashi ◽  
...  
Keyword(s):  
Plasma Source ◽  
Slot Antenna ◽  
Radial Line ◽  
Silicon Structures
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