A magnetically levitated synchronous permanent magnet planar motor with concentric structure winding used for lithography machine

2015 ◽  
Vol 117 (17) ◽  
pp. 17B525 ◽  
Author(s):  
Lu Zhang ◽  
Baoquan Kou ◽  
Feng Xing ◽  
Yinxi Jin ◽  
Hailin Zhang ◽  
...  
2019 ◽  
Vol 2019 (0) ◽  
pp. 521
Author(s):  
Nobuyuki KURITA ◽  
Nobuya HISHINUMA ◽  
Yoshihiko HIRANO ◽  
Akemi HATTA

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