A magnetically levitated synchronous permanent magnet planar motor with concentric structure winding used for lithography machine
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2019 ◽
Vol 2019
(0)
◽
pp. 521
2007 ◽
Vol 17
(2)
◽
pp. 2083-2086
◽
2019 ◽
Vol 2019
(17)
◽
pp. 4420-4425
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