Neutral particle dynamics in a high-power RF source
1989 ◽
Vol 29
(1)
◽
pp. 71-76
◽
1999 ◽
Vol 32
(2)
◽
pp. 106-120
◽
2007 ◽
Vol 4
(S1)
◽
pp. S419-S423
◽
2003 ◽
Vol 36
(15)
◽
pp. 1873-1880
◽
2005 ◽
Vol 48
(2)
◽
pp. 208-217
◽
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