scholarly journals Fabrication of a novel quartz micromachined gyroscope

AIP Advances ◽  
2015 ◽  
Vol 5 (4) ◽  
pp. 041325 ◽  
Author(s):  
Liqiang Xie ◽  
Jianchun Xing ◽  
Haoxu Wang ◽  
Xuezhong Wu
Keyword(s):  
Micromachined Gyroscope

A bulk micromachined gyroscope with improved quality-factors at atmospheric pressure

2007 ◽  
Author(s):  
Weiping Chen ◽  
Hong Chen ◽  
Xiaowei Liu ◽  
Tian Han ◽  
Hao Wang
Keyword(s):  
Atmospheric Pressure ◽  
Quality Factors ◽  
Micromachined Gyroscope

Design and Simulation of Capacitive Micromechaned Gyroscope

2011 ◽  
Vol 211-212 ◽  
pp. 909-913
Author(s):  
Yun Bo Shi ◽  
Xing Juan Zhao ◽  
Jun Tang ◽  
Jun Liu ◽  
Rui Rong Wang
Keyword(s):  
Atmospheric Pressure ◽  
Simulation Analysis ◽  
High Sensitivity ◽  
Drive Mode ◽  
Close Match ◽  
High Q ◽  
Air Damping ◽  
Large Numbers ◽  
Detection Mode ◽  
Micromachined Gyroscope

By researching and investigating the structure of capacitive gyroscopes, A novel capacitive micromachined gyroscope is proposed and the structure is designed. The method of electrostatic comber drive, capacitive detection of bar structure is used for the structure, and these make the gyroscope high sensitivity. The main air damping of the drive mode and detection mode is slide film damping, it is possible to make the gyroscope achieve high Q-values at atmospheric pressure. The decoupled gyroscope is designed, too. By large numbers of simulation analysis， frequencies of the first six steps mode are gained, nature frequencies of drive mode and sense mode of gyroscope are a close match, and rationality of the structure is validated. At last, the structure encapsulated is presented.

Disk-shaped bulk micromachined gyroscope with vacuum sealing

2000 ◽  
Vol 82 (1-3) ◽  
pp. 198-204 ◽  
Author(s):  
T Fujita ◽  
K Maenaka ◽  
T Mizuno ◽  
T Matsuoka ◽  
T Kojima ◽  
...  
Keyword(s):  
Vacuum Sealing ◽  
Micromachined Gyroscope

A Z-Axis Decoupled Micromachined Gyroscope with Dual Frames

2011 ◽  
Vol 483 ◽  
pp. 169-173
Author(s):  
Hai Lin Tang ◽  
Xian Xue Liu ◽  
Hao Zhou
Keyword(s):  
Quality Factor ◽  
Test Results ◽  
Dual Frames ◽  
Fabrication Errors ◽  
Micromachined Gyroscope

A z-axis decoupled micromachined gyroscope with dual frames is designed, fabricated and tested. The robust structure considering fabrication errors is obtained by the use of optimal robustness of design and process compensation. The gyroscope is packaged in vacuum, and test results show that quality factor of driving and sensing modes are 2000 and 800, respectively. In the range of 0~2400 deg/sec, sensitivity and linearity of the fabricated gyroscope are 1 deg/sec and 0.3%, respectively.

scholarly journals A Multi-Fork Z-Axis Quartz Micromachined Gyroscope

Sensors ◽  
2013 ◽  
Vol 13 (9) ◽  
pp. 12482-12496 ◽  
Author(s):  
Lihui Feng ◽  
Ke Zhao ◽  
Yunan Sun ◽  
Jianmin Cui ◽  
Fang Cui ◽  
...  
Keyword(s):  
Micromachined Gyroscope

Force feedback close-loop detection of silicon micromachined gyroscope based on bandpass sigma delta modulator

2015 ◽  
Vol 23 (9) ◽  
pp. 2540-2545
Author(s):  
吴志强 Wu Zhi-qiang ◽  
杨亮 YANG Liang ◽  
夏国明 XIA Guo-ming ◽  
苏岩 Su Yan
Keyword(s):  
Force Feedback ◽  
Sigma Delta Modulator ◽  
Sigma Delta ◽  
Loop Detection ◽  
Micromachined Gyroscope
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