Numerical study of effect of secondary electron emission on discharge characteristics in low pressure capacitive RF argon discharge
1994 ◽
Vol 346
(1-2)
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pp. 102-106
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2006 ◽
Vol 56
(S2)
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pp. B996-B1001
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2014 ◽
Vol 452
(1-3)
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pp. 37-40
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2002 ◽
Vol 11
(1)
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pp. 27-36
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1999 ◽
Vol 119
(2)
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pp. 165-170
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1996 ◽
Vol 29
(2)
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pp. 378-387
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