Note: Reliable low-vibration piezo-mechanical shutter

2014 ◽  
Vol 85 (9) ◽  
pp. 096101 ◽  
Author(s):  
Michael Bauer ◽  
Philipp Pierre Franzreb ◽  
Nicolas Spethmann ◽  
Artur Widera
Keyword(s):  
2005 ◽  
Vol 51 (4) ◽  
pp. 1060-1066 ◽  
Author(s):  
Wen-Chung Kao ◽  
Chin-Ming Hong ◽  
Sheng-Yuan Lin

1994 ◽  
Vol 336 ◽  
Author(s):  
Toshihiro Kamei ◽  
Nobuhiro Hata ◽  
Akihisa Matsuda

ABSTRACTEffects of intermittent deposition on the defect density in hydrogenated Amorphous silicon (a-Si:H) are investigated at various substrate temperatures by using a mechanical shutter, while maintaining the discharge continuously. The intermittent deposition experiments, where monolayer growth and intermission (waiting time) are repeated in cycles, enable us to study surface dangling bond (DB) recombination and thermal hydrogen desorption separately from other reactions on the growth surface. The defect density in films prepared at lower substrate temperatures decreases with the waiting time, while that deposited at higher substrate temperatures increases with the waiting time.


2005 ◽  
Vol 12 (5) ◽  
pp. 665-669 ◽  
Author(s):  
Milan Gembicky ◽  
Dan Oss ◽  
Ryan Fuchs ◽  
Philip Coppens

2021 ◽  
Vol 29 (4) ◽  
pp. 772-781
Author(s):  
Wei LIANG ◽  
◽  
Kai-yu QIN ◽  
Xiao-dong GAO ◽  
Ren-kui JIANG ◽  
...  

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