In-situ spectroscopic ellipsometry and structural study of HfO2 thin films deposited by radio frequency magnetron sputtering

2014 ◽  
Vol 116 (8) ◽  
pp. 083517 ◽  
Author(s):  
Ayten Cantas ◽  
Gulnur Aygun ◽  
Deepak Kumar Basa
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Structural Study ◽  
Spectroscopic Ellipsometry ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering

Nitrogen Doping into Cu2O Thin Films Deposited by Reactive Radio-Frequency Magnetron Sputtering

2001 ◽  
Vol 40 (Part 1, No. 4B) ◽  
pp. 2765-2768 ◽  
Author(s):  
Shogo Ishizuka ◽  
Shinya Kato ◽  
Takahiro Maruyama ◽  
Katsuhiro Akimoto
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Nitrogen Doping ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Cu2o Thin Films

scholarly journals In-situ x-ray studies of compositional control during synthesis of LaGaO3 by radio frequency-magnetron sputtering

2015 ◽  
Vol 107 (8) ◽  
pp. 081606 ◽  
Author(s):  
Matthew J. Highland ◽  
Dillon D. Fong ◽  
Guangxu Ju ◽  
Carol Thompson ◽  
Peter M. Baldo ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
X Ray ◽  
Compositional Control

scholarly journals Radio frequency magnetron sputtering of Li7La3Zr2O12 thin films for solid-state batteries

2016 ◽  
Vol 307 ◽  
pp. 684-689 ◽  
Author(s):  
S. Lobe ◽  
C. Dellen ◽  
M. Finsterbusch ◽  
H.-G. Gehrke ◽  
D. Sebold ◽  
...  
Keyword(s):  
Thin Films ◽  
Solid State ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Solid State Batteries

scholarly journals Preparation of LaFeO3 Perovskite Thin Films by Radio Frequency Magnetron Sputtering and Their Electrical Conductivities

2001 ◽  
Vol 69 (3) ◽  
pp. 171-176 ◽  
Author(s):  
Satoshi YAMADA ◽  
Hideo TAI ◽  
Yasumichi MATSUMOTO ◽  
Michio KOINUMA ◽  
Kai KAMADA ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Electrical Conductivities
Sign in / Sign up

Export Citation Format

Share Document