An exact field solution of contact resistance and comparison with the transmission line model

2014 ◽  
Vol 104 (20) ◽  
pp. 204102 ◽  
Author(s):  
Peng Zhang ◽  
Y. Y. Lau
2002 ◽  
Vol 85 (3) ◽  
pp. 16-22
Author(s):  
Kiichi Kamimura ◽  
Shinsuke Okada ◽  
Masato Nakao ◽  
Yoshiharu Onuma ◽  
Shozo Yamashita

1998 ◽  
Vol 37 (Part 1, No. 6A) ◽  
pp. 3284-3285 ◽  
Author(s):  
Kiichi Kamimura ◽  
ZhanHe Wang ◽  
Yoshiharu Onuma

2008 ◽  
Vol 55 (5) ◽  
pp. 1170-1176 ◽  
Author(s):  
Natalie Stavitski ◽  
Mark J. H. van Dal ◽  
Anne Lauwers ◽  
Christa Vrancken ◽  
Alexey Y. Kovalgin ◽  
...  

1993 ◽  
Vol 318 ◽  
Author(s):  
Geoffrey K. Reeves ◽  
Patrick W. Leech ◽  
H. Barry Harrison

ABSTRACTThis paper briefly reviews the standard Transmission Line Model (TLM) commonly used to measure the specific contact resistance of a planar ohmic contact. It is proposed that in the case of a typical Au-Ge-Ni alloyed ohmic contact, a more realistic model would need to take into account the presence of the alloyed layer at the metal-semiconductor interface. An alternative is described which is based on three contact layers and the two interfaces between them, thus forming a Tri-Layer Transmission Line Model (TLTLM). Expressions are given for the contact resistance Rc and the contact end resistance Re of this structure, together with a current division factor, f. Values for the parameters of this model are inferred from experimentally reported values of Rc and Re for two types of contact.


MRS Advances ◽  
2016 ◽  
Vol 1 (2) ◽  
pp. 157-162
Author(s):  
G.K. Reeves ◽  
Y. Pan ◽  
P.W. Leech ◽  
A.S. Holland

ABSTRACTA modified design of the transmission line model test structure uses the simple calculation of specific contact resistance, ρc, based on a two contact linear pattern but without the requirement of a mesa etch. This modified structure uses a linear TLM with semicircular terminations at each end. The function of the semicircular terminations is to confine the fringing fields at the ends of the linear TLM contacts. Simple analytical equations for determining ρc have been developed on the basis of the modified linear TLM pattern. These calculations have shown good agreement with a finite element model (FEM) of the modified TLM test structure using typical parameters for metal/ SiC contacts.


2018 ◽  
Vol 65 (4) ◽  
pp. 1589-1596 ◽  
Author(s):  
Stefano Venica ◽  
Francesco Driussi ◽  
Amit Gahoi ◽  
Pierpaolo Palestri ◽  
Max C. Lemme ◽  
...  

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